硅V型槽表面形貌的OCT可视化测量  

Visualization measurement for the surface topology of silicon V-groove using optical coherence tomography(OCT)

作　　者：秦玉伟[1,2] QIN Yuwei(School of Physics and Electrical Engineering, Weinan Normal University, Weinan 714099, Shaanxi, China Shaanxi Research Center of X-Ray Detection and Application, Weinan 714099, Shaanxi, China)

机构地区：[1]渭南师范学院物理与电气工程学院,陕西渭南714099 [2]陕西省X射线检测与应用研究开发中心,陕西渭南714099

出　　处：《光学技术》2016年第6期534-537,共4页Optical Technique

基　　金：陕西省教育厅科研计划项目(15JK1252;15JK1380);渭南师范学院科研计划项目(15ZRRC08);渭南师范学院特色学科建设项目(14TSXK07)

摘　　要：介绍了一种硅V型槽表面形貌测量的可视化方法,分析了谱域OCT的测量原理。利用谱域OCT实验测量系统进行了硅V型槽的成像实验,得到了硅V型槽的二维层析图像;通过分析二维层析图像,获取了硅V型槽的结构尺寸,实现了硅V型槽表面形貌的高精度可视化测量。A visualization measurement method for silicon V-groove surface topology is introduced. The principle of spectral domain optical coherence tomography （OCT） is analyzed. The imaging experiment is performed on the silicon V-groove by the experimental spectral-domain OCT system. The two-dimensional cross-sectional image is obtained, and the construction dimension is obtained by analyzing the two-dimensional cross-sectional image. It can reach visualization measurement method for silicon V-groove surface tomography with high accuracy.

关 键 词：OCT V型槽 表面形貌 谱域 可视化 

分 类 号：TH741[机械工程—光学工程]