TEM电子枪中极板参数对电场强度分布的影响  

The influence of plate parameters on the field intensity distribution in the TEM electron gun

作　　者：孟庆浪 董全林[3,2] 钱建强[3] 

机构地区：[1]北京航空航天大学物理科学与核能工程学院,北京100191 [2]北京航空航天大学微纳测控与低维物理教育部重点实验室,北京100191 [3]北京航空航天大学仪器科学与光电工程学院,北京100191

出　　处：《云南大学学报（自然科学版）》2016年第6期879-887,共9页Journal of Yunnan University(Natural Sciences Edition)

基　　金：国家科技支撑计划(2006BAK03A24)

摘　　要：电子枪主要是由极板和密封环组成的,电子在空间中的运动由极板分布和极板电压等决定,可以说枪内极板的性能在很大程度上决定了电子枪的发射性能,选择正确的极板可以在小范围内获得精确度高、束流稳定的电子束流.针对透射电子显微镜(TEM),对其电子枪中的栅极、吸出极进行了分析,对加速极则从单极板、双极板到多极板3种模型进行分析讨论,并利用Matlab、Ansys等软件进行仿真,得到电极形状、电压与枪内电场强度分布的一些关系,这为电子枪结构的设计提供了参考和依据.Electron gun is mainly composed of electrode plate and sealing ring, and the electronic sport in space is determined by the plate voltage and the distribution of plate. Since the emission performance of electron gun is determined to a great extent by the performance of the electrode plate, a small section electron beam with high precision and good stability can be gained by choosing a right electrode plate.In this article, the grid elec-trode and the extraction electrode in the Transmission Electron Microscope （TEM） has been analyzed and the acceleration plate has been discussed from the three model, respectively single plate, double plate, multiple plate. We have obtained some relationships between the electrode plate and the distribution of electric field intensity in the electron gun by carrying on the simulation using Matlab and Ansys software.These conclusions provide theo-retical basis for the structure design of the electron gun.

关 键 词：电子枪 极板 电场强度 加速极 透射电子显微镜(TEM) 

分 类 号：TB97[一般工业技术—计量学]