Cu系纳米金属多层膜微柱体的形变与损伤及其尺寸效应  

SIZE EFFECTS ON THE DEFORMATION AND DAMAGE OF Cu-BASED METALLIC NANOLAYERED MICRO-PILLARS

作　　者：孙军[1] 张金钰[1] 吴凯[1] 刘刚[1] 

机构地区：[1]西安交通大学金属材料强度国家重点实验室,西安710049

出　　处：《金属学报》2016年第10期1249-1258,共10页Acta Metallurgica Sinica

基　　金：国家重点基础研究发展计划项目2010CB631003;国家自然科学基金项目51571157;51321003;51322104和51201123;高等学校学科创新引智计划项目B06025;陕西省自然科学基金基础研究计划项目2015JM5158资助~~

摘　　要：纳米金属多层膜材料已成为目前高性能微元器件以及互连结构的核心材料体系,其服役过程中的变形损伤与断裂是导致系统失效的关键因素.以本课题组近年来的研究结果为基础,结合当前国内外有关金属多层膜微柱体塑性变形行为研究的最新进展,阐述了金属多层膜微柱体微观结构-尺寸约束-服役性能三者之间的关联性,揭示了金属多层膜微柱体变形模式与损伤的内在规律,归纳了晶体/晶体与晶体/非晶两类层状结构材料加工硬化/软化行为的微观机理,并对纳米金属多层膜研究的发展趋势进行了展望.The nanostructured metallic multilayers（NMMs） are widely used as essential components of high performance microelectronics and interconnect structures. The deformation and damage of NMMs is the essential factor leading to the structural failure of these systems. In this paper, based on these experimental results achieved by the authors, as well as the state-of-the-art and progress at home and abroad in the plastic deformation behavior of micropillars of Cu- based NMMs, the correlation of microstructure- size constraint- mechanical performance in the Cu-based nanolayered micropillars is illustrated. The universality of their deformation modes and internal damage mechanisms are revealed, and the work hardening /softening behaviors of two types of nanolaminates, including crystalline/crystalline and crystalline/amorphous NMMs, are summarized. Finally, a brief prospect on the studies of NMMs in future is suggested.

关 键 词：纳米金属多层膜 微柱体 塑性变形 形变损伤 尺寸效应 

分 类 号：TG113[金属学及工艺—物理冶金]