离轴三反系统计算机辅助装调  

Computer aided alignment for off-axis TMA system

作　　者：王彬[1,2] 伍凡[1] 叶玉堂[2] 

机构地区：[1]中国科学院光电技术研究所,四川成都610209 [2]电子科技大学光电信息学院,四川成都610054

出　　处：《红外与激光工程》2016年第11期243-249,共7页Infrared and Laser Engineering

基　　金：国家自然科学基金(61178043)

摘　　要：为实现对离轴三反系统快速、有效的装调,提出了一种离轴三反系统计算机辅助装调(CAA)方法。该方法在理论分析失调后离轴三反系统像差特性的基础上,结合CAA技术及光学装调的实际情况,选择出最少且最合理的调整量;根据检测数据及CAA数学模型直接计算出调整量的大小及方向。采用该方法对一离轴三反系统进行实际装调,将调整量从11个减少到7个,利用波前传感器被动式检测方法对离轴三反系统0及±1视场像质进行检测,通过一次计算调整快速使该系统全视场波像差从RMS≤0.32λ减少至RMS≤0.067λ(λ=632.8 nm),结果表明该装调方法简单、有效。To realize the fast, efficient alignment of off-axis three-mirror anastigmatic （TMA） system, a computer aided alignment （CAA） method Was proposed. First, the aberration characteristics in the misaligned off-axis TMA system was theoretically analyzed to determine the evaluation parameters in CAA. Second, the key alignment parameters to be adjusted were given by combining the misalignment characteristics with the actual situation of the optical assembly. Finally, the magnitudes and orientation of the alignment parameters were calculated with the measurement data and CAA model. In order to verify the method, an off-axis TMA system was aligned according to this CAA method. The wave-front error （WFE） of the center and extreme edge FOVs were measured by wave-front sensor. After only once calculation and alignment, the measured root mean square （RMS） WFEs were reduced from 0.32（λ to 0.067）（λ（（λ=632.8 nm）. The experiment results demonstrate that this CAA method is feasible.

关 键 词：计算机辅助装调 离轴三反系统 失调特性 ZERNIKE多项式 

分 类 号：V248.3[航空宇航科学与技术—飞行器设计]