One-dimensional hybrid simulation of the electrical asymmetry effect caused by the fourth-order harmonic in dual-frequency capacitively coupled plasma  

作　　者：王帅 龙海凤 毕振华 姜巍 徐翔 王友年 

机构地区：[1]Department of Physics, College of Sciences, Northeastern University [2]Liaoning Key Lab of Optoelectronic Films & Materials, School of Physics and Materials Engineering,Dalian Nationalities University [3]School of Physics, Huazhong University of Science and Technology [4]School of Physics and Optoelectronic Technology, Dalian University of Technology

出　　处：《Chinese Physics B》2016年第11期387-392,共6页中国物理B（英文版）

基　　金：Project supported by the National Natural Science Foundation of China(Grant Nos.11305032,11305028,11375163,and 11275039);the Scientific Foundation of Ministry of Education of China(Grant No.N130405008)

摘　　要：A one-dimensional hybrid model was developed to study the electrical asymmetry effect（EAE） caused by the fourthorder harmonic in a dual-frequency capacitively coupled Ar plasma.The self-bias voltage caused by the fourth-order frequency changes periodically with the phase angle,and the cycle of self-bias with the phase angle is π/2,which is half of that in the second-order case.The influence of the phase angle between the fundamental and its fourth-order frequency on the ion density profiles and the ion energy distributions（IEDs） were studied.Both the ion density profile and the IEDs can be controlled by the phase angle,which provides a convenient way to adjust the sheath characters without changing the main discharge parameters.A one-dimensional hybrid model was developed to study the electrical asymmetry effect（EAE） caused by the fourthorder harmonic in a dual-frequency capacitively coupled Ar plasma.The self-bias voltage caused by the fourth-order frequency changes periodically with the phase angle,and the cycle of self-bias with the phase angle is π/2,which is half of that in the second-order case.The influence of the phase angle between the fundamental and its fourth-order frequency on the ion density profiles and the ion energy distributions（IEDs） were studied.Both the ion density profile and the IEDs can be controlled by the phase angle,which provides a convenient way to adjust the sheath characters without changing the main discharge parameters.

关 键 词：harmonic asymmetry periodically sheath fourth adjust separate convenient cycle linearly 

分 类 号：O53[理学—等离子体物理]