Large scale fabrication of nitrogen vacancy-embedded diamond nanostructures for single-photon source applications  

作　　者：姜倩晴 李无瑕 唐成春 常彦春 郝婷婷 潘新宇 叶海涛 李俊杰 顾长志 

机构地区：[1]Beijing National Laboratory of Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences [2]Beijing National Laboratory for Molecular Sciences, Institute of Chemistry, Chinese Academy of Science [3]CAS Key Laboratory of Vacuum Physics, School of Physical Sciences, University of Chinese Academy of Sciences [4]Collaborative Innovation Center of Quantum Matter [5]School of Engineering and Applied Science, Aston University

出　　处：《Chinese Physics B》2016年第11期594-599,共6页中国物理B（英文版）

基　　金：Project supported by the National Key Research and Development Plan of China(Grant No.2016YFA0200402);the National Natural Science Foundation of China(Grants Nos.11574369,11574368,91323304,11174362,and 51272278);the FP7 Marie Curie Action(project No.295208)sponsored by the European Commission

摘　　要：Some color centers in diamond can serve as quantum bits which can be manipulated with microwave pulses and read out with laser,even at room temperature.However,the photon collection efficiency of bulk diamond is greatly reduced by refraction at the diamond/air interface.To address this issue,we fabricated arrays of diamond nanostructures,differing in both diameter and top end shape,with HSQ and Cr as the etching mask materials,aiming toward large scale fabrication of single-photon sources with enhanced collection efficiency made of nitrogen vacancy（NV） embedded diamond.With a mixture of O2 and CHF3 gas plasma,diamond pillars with diameters down to 45 nm were obtained.The top end shape evolution has been represented with a simple model.The tests of size dependent single-photon properties confirmed an improved single-photon collection efficiency enhancement,larger than tenfold,and a mild decrease of decoherence time with decreasing pillar diameter was observed as expected.These results provide useful information for future applications of nanostructured diamond as a single-photon source.Some color centers in diamond can serve as quantum bits which can be manipulated with microwave pulses and read out with laser,even at room temperature.However,the photon collection efficiency of bulk diamond is greatly reduced by refraction at the diamond/air interface.To address this issue,we fabricated arrays of diamond nanostructures,differing in both diameter and top end shape,with HSQ and Cr as the etching mask materials,aiming toward large scale fabrication of single-photon sources with enhanced collection efficiency made of nitrogen vacancy（NV） embedded diamond.With a mixture of O2 and CHF3 gas plasma,diamond pillars with diameters down to 45 nm were obtained.The top end shape evolution has been represented with a simple model.The tests of size dependent single-photon properties confirmed an improved single-photon collection efficiency enhancement,larger than tenfold,and a mild decrease of decoherence time with decreasing pillar diameter was observed as expected.These results provide useful information for future applications of nanostructured diamond as a single-photon source.

关 键 词：diamond fabrication pillar diameters photon etching collection microwave decreasing toward 

分 类 号：TQ163[化学工程—高温制品工业]