基于自适应测量步长的激光调阻控制策略  

Laser trimming control strategy based on self-adaptive measuring step

作　　者：封芸 金越越 梁进智 

机构地区：[1]北京奥依特科技有限责任公司,北京100015

出　　处：《激光与红外》2016年第11期1325-1328,共4页Laser & Infrared

摘　　要：针对0603型片式电阻在不同位置的阻值变化率不同,提出了基于自适应测量步长的激光调阻控制策略。这种调阻控制策略可根据当前阻值与目标值的偏差百分比自适应选择测量步长。经过实验分析,与固定测量步长的控制策略相比,这种控制策略不仅能够保证激光修调精度也能提高激光修调效率。为了使这种控制策略能够广泛应用于不同电阻型号的激光修调,介绍了自适应测量步长控制策略的建模过程,在不了解刻蚀路径对阻值变化率的影响时可建模之后再应用这种控制策略。As type 0603 chip resistance has the different resistance change rates in different locations, a laser trimming control strategy based on self-adaptive measuring length is presented. The laser trimming control strategy can choose measuring step adaptively by the percentage difference between resistance value and target values. Through experimen- tal analysis, it can both improve the precision and the efficiency by comparing with the control strategy based on fixed measuring step. In order to be widely used in laser trimming of other type resistance,the modeling method of the con- trol strategy was introduced. The strategy can be used after modeling when there is no clear relationship between cut- ting paths and resistance change rates.

关 键 词：激光修调 自适应测量步长 控制策略 刻蚀路径 

分 类 号：TN249[电子电信—物理电子学]