多孔硅复合材料的制备与应用研究进展  

Research Progress on Fabrication and Application of the Porous Silicon Composite Material

作　　者：杨家乐[1,2] 沈鸿烈[1,2] 邢正伟[1,2] 

机构地区：[1]南京航空航天大学材料科学与技术学院,南京210016 [2]江苏省能量转换材料与技术重点实验室,南京210016

出　　处：《微纳电子技术》2016年第12期787-796,共10页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61176062);江苏省前瞻性联合创新项目(BY2013003-08);研究生创新基地(实验室)开放基金资助项目(KFJJ20160605);江苏省光伏科学与技术协同创新中心;江苏高校优势学科建设工程项目

摘　　要：多孔硅具有独特的结构和优异的物理、化学性能,基于多孔硅的复合材料性能更加优越,其应用前景值得期待。综述了多孔硅的起源及其发展过程。介绍了多孔硅复合材料的多种制备方法,其中重点介绍了电镀法和无电沉积法,讨论了沉积物形貌的影响因素以及每种沉积方法的优缺点。对多孔硅复合材料在多个领域的应用分别进行了概述,包括传感器、含能材料、锂离子电池、超级电容器和生物医学等,分析了复合结构对多孔硅性能提升的作用。最后展望了根据实际需求设计并可控制备多孔硅复合材料的前景。Porous silicon has unique structure and excellent physical and chemical properties.The composite material based on the porous silicon has superior performances,and has a promising application potential.Firstly,the origin and development of the porous silicon are reviewed.The several preparation methods of the porous silicon composite material are introduced,especially the electroplating method and electroless deposition method.The influence factors of the deposit morphology as well as the advantages and disadvantages of each deposition method are discussed.After that,the applications of the porous silicon composite material in several fields are summarized respectively,including sensors,energetic materials,Li-ion batteries,supercapacitors,biomedicine and so on.The effects of the composite structure on the performance enhancement of the porous silicon are analyzed.Finally,the prospects of the design and controllable preparation of porous silicon composite materials according to practical demands are predicted.

关 键 词：多孔硅复合材料 沉积方法 电镀法 无电沉积法 沉积物形貌 

分 类 号：TN304.12[电子电信—物理电子学]