硅微通道板电沉积Fe-Ni微米线阵列结构及磁性能  

Structure and Magnetic Properties of the Fe-Ni Microwire Arrays Prepared on the Silicon Microchannel Plate by Electrodeposition

作　　者：付梦秋 连柯楠[1,2] 童新[1,2] 谭人玮[2] 赵振杰[3] 徐少辉[1,2] 朱一平[2] 熊大元[1,2] 王连卫[1,2] 

机构地区：[1]华东师范大学上海市多维度信息处理重点实验室,上海200241 [2]华东师范大学极化材料与器件教育部重点实验室,上海200241 [3]华东师范大学物理与材料科学学院,上海200062

出　　处：《微纳电子技术》2016年第12期797-800,806,共5页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61176108);上海市科学技术委员会资助项目(14DZ2260800)

摘　　要：采用恒流电镀法,以硅微通道板(Si-MCP)为衬底,在其内沉积铁镍合金材料,得到了三维磁微米线阵列结构并研究了其磁性能。X射线衍射(XRD)图谱显示所沉积的铁镍合金呈现面心立方(FCC)晶体结构,其中(111)晶面和(200)晶面取向度较大。能谱仪(EDS)能谱显示电沉积的合金成分中Fe约占17%,Ni约占83%。使用振动磁强计分别测试外加磁场方向垂直样品表面和平行样品的磁滞回线,发现当外加磁场垂直样品表面时矩形比Mr/Ms为0.37,磁场平行样品表面时矩形比Mr/Ms为0.03,结果说明样品易磁化方向与表面垂直,并且具有明显的磁各向异性,这主要是由于磁微米线阵列的形状各向异性。Using the constant current plating method,the 3D magnetic microwire arrays were obtained by depositing the Fe-Ni alloy materials on the silicon microchannel plate（Si-MCP）substrate.And the magnetic performance of the 3D magnetic microwire arrays was studied.The Xray diffraction（XRD）results reveal that the structure of the deposited Fe-Ni alloy is face center cubic（FCC）structure,and the orientation degrees of（111）and（200）crystal planes are higher.The EDS result shows that in the composition of the deposited Fe-Ni alloy,the ratio of Fe is about 17% and the ratio of Ni is about 83%.The hysteresis loops of the sample with the magnetic fields applied parallel and perpendicular to the plane were tested by the vibrating magnetometer.It is found that the squareness ratio Mr/Msis 0.37 with the applied magnetic field perpendicular to the plane,while the squareness ratio Mr/Msis 0.03 with the applied magnetic field parallel to the plane.The results show that mainly due to the shape anisotropy of the magnetic microwire array,the easy magnetization direction of the sample is perpendicular to the plane,and the sample has obvious magnetic anisotropy.

关 键 词：硅微通道板(Si-MCP) 电沉积 铁镍合金 磁微米线阵列 磁滞回线 

分 类 号：TB383[一般工业技术—材料科学与工程]