温度和He累积损伤对Er_2O_3薄膜相结构及结晶度的影响  

Effects of temperature and He cumulative damage on Er_2O_3 film phase structure and crystallinity

作　　者：石云龙[1,2] 劳远侠[3] 王玲[3] 张海斌[2] 邓爱红[1] 汪渊[3] SHI Yun-Long1＇3 LAO Yuan-Xia2 WANG Ling2 ZHANG Hai-Bing3 DENG Ai-Hong1 WANG Yuan 2 1. Department of Physics Sichuan University Chengdu 610064 China~ 2. Key Laboratory for Radiation Physics and Technology o~ Ministry of Education Institute of Nuclear Science and Technology

机构地区：[1]四川大学物理科学与技术学院,成都610064 [2]中国工程物理研究院核物理与化学研究所,绵阳621900 [3]四川大学原子核科学与技术研究所辐射物理及技术教育部重点实验室,成都610064

出　　处：《四川大学学报（自然科学版）》2016年第6期1340-1344,共5页Journal of Sichuan University(Natural Science Edition)

基　　金：国家自然科学基金(51171124;11505121);国家国际科技合作专项(2014DFR50710);四川省科技支撑计划(2014GZ0004)

摘　　要：采用反应磁控溅射法制备Er_2O_3薄膜,并利用X射线衍射仪(XRD),场发射扫描电子显微镜(SEM)对含He的Er_2O_3薄膜的结晶情况、截面和表面形貌进行表征,结果表明:无He的Er_2O_3薄膜在500℃退火时相结构基本保持稳定,在700℃退火时Er_2O_3薄膜发生明显的单斜相向立方相的转变.而含He的Er_2O_3薄膜的结晶度可能与He的存在形式有关.掺氦量较小时,未形成He泡,由于He的引入Er_2O_3薄膜的结晶度下降;随着掺氦量增加,He泡形成带来很高的内压,而在高压下Er_2O_3单斜相更易保持稳定.In this paper,Er2O3 films are prepared in mixing atmosphere by radio frequency magnetron sputtering method. The phase structures, surface and cross-section morphologies of Er2Oafilms are characterized by X-ray diffraction （XRD） and scanning electron microscope （SEM）, respectively. The results show that the phase structure of the pure Er2O3 film is still stable under the annealed tempera- ture of 500℃. However, with the annealing temperature increasing, the monoclinic phase of the Er2O3 film can transform into cubic phase at 700℃. In addition, for the Er2O3 film with He containing, the de- gree of crystallinity may be affected by He atoms. He bubbles can not be formed with small amount of He doped in, and the diffraction peak of the Er2Oa film is decreased obviously compared with that of the pure Er2O3 film. As the content of the doped He atoms increase, the monoclinic phase of theEr2O3 film becomes more stable under the high internal pressure due to the forming of He bubbles.

关 键 词：Er2O3薄膜 相稳定 He损伤 

分 类 号：O469[理学—凝聚态物理]