超精密磁流变复合抛光技术研究进展  

A Review on Ultra-precision Compound Polishing Technology of Magnetorheological

作　　者：肖晓兰[1] 阎秋生[1] 潘继生[1] 于鹏[1] 梁华卓 陈润[1] 

机构地区：[1]广东工业大学机电工程学院,广东广州510006

出　　处：《广东工业大学学报》2016年第6期28-33,共6页Journal of Guangdong University of Technology

基　　金：国家自然科学基金资助项目(51375097);广东省自然科学基金重点项目(2015A030311044);高等学校博士学科点专项科研基金(20134420110001)

摘　　要：对超精密磁流变复合抛光技术的国内外研究进展进行了评述,介绍了当前主要应用的几种超精密磁流变复合抛光技术的加工原理和发展现状.重点介绍了磁流变射流复合抛光、超声波磁流变复合抛光、化学机械磁流变复合抛光以及集群磁流变复合抛光的加工技术内涵,从加工效率、加工表面均匀性、加工精度、加工适合的材料与形状等方面对上述几类超精密磁流变复合抛光方法进行比较和评述.最后对超光滑无损伤超精密磁流变抛光技术的发展方向进行了预测.Research on magnetorheological finishing technology at home and abroad is reviewed .Accord-ing to the development of magnetorheological finishing technology , the current main application of ultra-precision machining principle and progress of magnetorheological compound polishing technology are elab -orated , mainly focusing on Magnetorheological Jet Polishing , Ultrasonic-magnetorheological Compound Polishing, Chemo-mechanical Magnetorheological Finishing and Cluster of MRF processing methods and mechanism of material removal .Then the MRF method is compared in terms of surface precision machi-ning , surface integrity and processing efficiency .Finally , a discussion is conducted on how to improve the precision polishing efficiency , forecasting the development of ultra-precision magnetorheological fin-ishing and pointing out the key research direction in the future .

关 键 词：超精密 加工 磁流变 复合抛光 技术发展 

分 类 号：TH709[机械工程—仪器科学与技术]