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作 者:Dong Yan Liang Yin Xiaowei Liu Wenning Jiang Qiuye Lv
机构地区:[1]MEMS Center,Harbin Institute of Technology [2]Key Laboratory of Micro-systems and Micro-structures Manufacturing,Ministry of Education
出 处:《Journal of Harbin Institute of Technology(New Series)》2016年第6期47-53,共7页哈尔滨工业大学学报(英文版)
基 金:Sponsored by the Fundamental Research Funds for the Central Universities(Grant No.HIT.NSRIF.2013040)
摘 要:In this paper the design and implementation of sixth-order lowpass elliptic switched-capacitor filter( SCF) for interface circuit of Micro-Electro-Mechanical System( MEMS) sensor are presented. This work aims to lower total harmonic distortion( THD) without deteriorating other performances. After system design in Simulink,the filter is realized in transistor level and finally fabricated in Central Semiconductor Manufacturing Corporation( CSMC) 0.5 μm metal-oxide-semiconductor( CMOS) technology. Typical measured results are: it operates with 25: 1 clock-to-corner frequency ratio and a 10 k Hz maximum corner frequency. The maximum passband ripple is about 0.49 d B and the minimum stopband rejection is 40 d B for the temperature from-20 ℃to 80 ℃. For the 250 k Hz clock frequency setting,given the 1 k Hz,- 8 d BVrms input signal,the measured worst case THD is-64 d B. The active area of the chip is 2.8 mm2 with 8 pads. The analog power dissipation is10 m W from a 5 V power supply.In this paper the design and implementation of sixth-order lowpass elliptic switched-capacitor filter (SCF) for interface circuit of Micro-Electro-Mechanical System (MEMS) sensor are presented. This work aims to lower total harmonic distortion ( THD) without deteriorating other performances. After system design in Simulink, the filter is realized in transistor level and finally fabricated in Central Semiconductor Manufacturing Corporation (CSMC) 0.5μm metal-oxide-semiconductor (CMOS) technology. Typical measured results are: it operates with 25 : 1 clock-to-corner frequency ratio and a 10 kHz maximum corner frequency. The maximum passband ripple is about 0.49 dB and the minimum stopband rejection is 40 dB for the temperature from -20 ℃to 80℃ .For the 250 kHz clock frequency setting, given the 1 kHz, -8 dBVnns input signal, the measured worst case THD is -64 dB. The active area of the chip is 2.8 mm2 with 8 pads. The analog power dissipation is 10 mW from a 5 V power supply.
关 键 词:SWITCHED-CAPACITOR lowpass elliptic filter biquad
分 类 号:TN492[电子电信—微电子学与固体电子学]
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