不同氧含量Cr-Al-Si-O-N涂层的结构和力学性能  

Microstructure and mechanical properties of Cr-Al-Si-O-N coatings with different oxygen contents

作　　者：梅海娟 聂志伟[1] 冯思成 代伟[1] 邹长伟[1] 王启民[1] 

机构地区：[1]广东工业大学机电工程学院,广州510006

出　　处：《中国有色金属学报》2016年第10期2136-2144,共9页The Chinese Journal of Nonferrous Metals

基　　金：国家自然科学基金资助项目(51275095;U1201245);广东省自然科学基金资助项目(2014A030311002);广东省高等学校珠江学者岗位计划资助项目(2012)~~

摘　　要：采用电弧离子镀制备不同氧含量的Cr-Al-Si-O-N涂层,研究氧含量对纳米复合涂层的组织结构和力学性能的影响。结果表明:随着氧氮流量比从0增加到25%时,涂层中的氧含量从0增加到51.8%(摩尔分数),而氮含量从33.5%逐渐减少到9.8%;CrAlSiON涂层主要以面心立方结构的(Cr,Al)N固溶体形式存在,其择优取向为(111)和(200)。随着氧含量的增加,涂层的硬度呈先增加后减小的趋势;当氧氮流量比为10%时,硬度达到最大值3349HK。由于氧化物的存在,含氧涂层在高温高速的摩擦中表现出优异的性能,具有较低的摩擦因数。Cr-Al-Si-O-N coatings with different oxygen contents were deposited by cathode arc ion plating. The effects of oxygen contents on the microstructure and mechanical properties of the nano-composite coatings were investigated. The results indicate that the oxygen content in the films increases from 0 to 51.8% （mole fraction） while the nitrogen content decreases from 33.5% to 9.8% with increasing the flow ratio of O2/（O2＋N2） from 0 to 25%. The CrAlSiON coatings are mainly comprised of FCC-（Cr,Al）N solid-solution structures, （111） and （200） preferred crystalline orientation exists in the films. With the increase of oxygen contents, the hardness shows a trend of decrease after the first increase, and the highest film hardness is 3349 HK at the flow ratio of O2/（O2＋N2） of 10%. As a result of the existence of oxide, the oxygen coatings remain lower friction coefficient, and show excellent performance at high temperature and high speed friction.

关 键 词：Cr-Al-Si-O-N 电弧离子镀 氧含量 组织结构 力学性能 高温摩擦 

分 类 号：TG115[金属学及工艺—物理冶金]