激光阶梯刻蚀法制备45°微反射镜及垂直耦合研究  

Research on Fabrication and Vertical Coupling of 45°Micromirror with Laser Stepped Ablation Method

作　　者：邓传鲁[1,2] 宋志强[1,2] 庞拂飞[1,2] 王建辉[1,2] 王廷云[1,2] Deng Chuanlu Song Zhiqiang Pang Fufei Wang Jianhui Wang Tingyun(Key Lab of Specialty Fiber Optics and Optical Access Networks, Shanghai University, Shanghai 200072, China School of Communication and Information Engineering, Shanghai University, Shanghai 200072, China)

机构地区：[1]上海大学特种光纤与光接入网省部共建重点实验室,上海200072 [2]上海大学通信与信息工程学院,上海200072

出　　处：《中国激光》2016年第11期20-25,共6页Chinese Journal of Lasers

基　　金：上海市教委创新重点项目(14ZZ093);上海市科技成果转化与产业化项目(16511104300)

摘　　要：提出了一种基于准分子激光制备45°微反射镜的新方法──激光阶梯刻蚀法,介绍了该方法的工艺流程。通过优化参数制备了微反射镜样品,详细分析了样品参数对微镜反射性能的影响。利用微反射镜样品进行垂直耦合实验,深入讨论了影响系统损耗的主要因素。实验结果表明,微反射镜样品造成的损耗约为3.5dB。该制备方法有望在大尺寸光波导互连背板耦合器件的研制中得到广泛应用。One method to fabricate 45° micromirror based on the excimer laser, namely, the laser stepped ablation method, is proposed and its fabrication process is introduced. Via the parameter optimization, micromirror samples are obtained, and the influences of sample parameters on the reflecting performance of micromirrors are analyzed in detail. A vertical coupling experiment is conducted with these micromirror samples. The main factors that affect the system loss are discussed deeply. The experimental results indicate that the loss induced by micromirrors is approximated to 3.5 dB. The fabrication technique proposed is expected to be widely applied in the fabrication of coupling components of large size optical waveguide interconnection backplane.

关 键 词：激光技术 光波导 45°微反射镜 激光阶梯刻蚀法 垂直耦合 

分 类 号：TN252[电子电信—物理电子学]