基于高性能黑硅MEMS热电堆的激光功率测试方法  

Laser Power Measurement Method Based on High Performance Black Silicon MEMS Thermopile Power Meter

作　　者：李竞男[1,2] 鲍爱达[1,2] 秦丽[1,2] Li Jingnan Bao Aida Qin Li(School of Instrument and Electronics, North University of China, Taiyuan, Shanxi 030051, China National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan, Shanxi 030051, China)

机构地区：[1]中北大学仪器与电子学院,山西太原030051 [2]中北大学电子测试技术国防科技重点实验室,山西太原030051

出　　处：《激光与光电子学进展》2016年第11期280-285,共6页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(51375463);山西省自然科学基金(2014011021-5)

摘　　要：针对传统激光功率计体积庞大、响应速度慢且检测精度难以保证的缺陷,提出了一种基于高性能黑硅MEMS热电堆的激光功率测试方法。该测试方法利用激光的热效应,以CO2激光器为被测激光光源,黑硅MEMS热电堆探测器为激光探测传感器。根据能量转换原理,热电堆吸收激光辐射的能量转换为自身热力学能,热力学能以电压的形式输入CMOS接口电路。通过TopView2000通用虚拟仪器应用软件采集和处理数据,获得激光功率相关数据。在室温条件下,对MEMS热电堆激光功率检测系统在不同占空比和不同出光时间的CO2激光照射下,进行重复实验。结果表明,在激光输出占空比为30%、总出光时间为150 ms条件下,系统热响应时间为14.92ms,计算出激光功率值为23.01 W,测量相对偏差为0.55%,满足了实际应用中对激光功率高精度、低成本、低功耗、强便携性等的需求。Traditional laser power meter has the defects of large volume, slow response, and are difficult to guarantee the detection accuracy, so a laser power measurement method based on high performance black silicon MEMS thermopile power meter is put forward. The test method uses the laser thermal effects, and CO2 laser is used as the measured laser source, and the black silicon MEMS thermopile detector is the laser detection sensor. Based on the principle of energy conversion, the absorbed laser radiation by a thermopile is converted into its thermodynamic energy, and the thermodynamic energy is input to the CMOS interface circuit in the manifestation of the potential. Potential input data are collected and processed by TopView2000 application software, and the data of the laser power are obtained. Under the room temperature condition, the MEMS laser power detection system repeat test is carried out under the CO2 laser irradiation with different duty cycles and different light time. Under the conditions of 30% laser output duty ratio and the 150 ms total light time, the experimental results show that the response time of the system is 14.92 ms, the laser power value is calculated as 23.01 W, and the measurement uncertainty of the system is 0.55%, which meets the needs of high precision, low cost, low power consumption and portability of laser power in practical application.

关 键 词：光电子学 光电检测 激光功率测量 CMOS接口电路 黑硅MEMS热电堆探测器 

分 类 号：TH247[机械工程—机械制造及自动化]