薄膜锂电池制备工艺现状  

State-of-art of preparation technology of thin-film lithium batteries

作　　者：杜柯[1] 解晶莹[1] 张宏[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所,上海200050

出　　处：《电源技术》2002年第B07期239-242,共4页Chinese Journal of Power Sources

基　　金：国家自然科学基金 (50 1 72 0 58)

摘　　要：随着无线电通讯和集成光电路的迅速发展 ,在很多电子设备上都要求有独立的高性能微型电源。薄膜锂电池作为一种重要的微型能源形式 ,正在受到越来越多的关注和研究。概述了国际上目前制备薄膜锂电池的阴极膜、阳极膜和电解质膜过程中所采用的各种工艺手段 ,从工作原理、采用的材料与设备、得到的膜的物理化学性能等各个方面对这些工艺方法进行了分析。With the rapid progress of wireless telecommunication and integrated optoelectronic circuit, most electronic devices require individual micro power supply with high performance. As an important micro power supply, thin film lithium battery is attracting more and more attention and research. Various technologies for preparing cathode film, anode film and electrolyte film for thin film lithium battery are reviewed. The technologies are compared, analyzed and evaluated from the point of view of the working principle, the material and equipment adopted, the physical and chemical properties of the obtained film,etc.

关 键 词：阴极膜 阳极膜 电解质膜 蓄电池 薄膜锂电池 制备工艺 

分 类 号：TM912.9[电气工程—电力电子与电力传动]