基于氦质谱检漏的多箱多泵组检漏技术研究  

Research on Multi-tank and Multi-pump Leak Detection Technology of Helium Mass Spectrometry Leak Detection

作　　者：朱长平 

机构地区：[1]安徽皖仪科技股份有限公司,安徽合肥230088

出　　处：《中国仪器仪表》2016年第11期27-29,共3页China Instrumentation

基　　金：国家重大科学仪器设备开发专项(2012YQ220084)

摘　　要：从真空箱多箱多泵组的检漏原理出发,讨论多箱多泵组的时序分配问题、各段时序中设备资源的合理利用,达到最佳工作组合,各段时间内真空箱的压力、漏率的变化情况。实现高效率的检漏需求。Based on the principle of leak detection of multi-tank and multi-pump of vacuum box, the problem of timing allocation of multi-tank and multi-pump, reasonable utilization of equipment resources in each time sequence to achieve the best combination, and box pressure, leakage rate changes to achieve a high efficiency of the leak detection needs are discussed in this paper.

关 键 词：氦质谱检漏 多箱联动 时序分配 资源分配 

分 类 号：TB774[一般工业技术—真空技术]