磁过滤真空离子镀技术在装饰加工领域的应用  

Application of Magnetic Filtered Vacuum Ion Plating Technology in Decorative Processing

作　　者：陈志勇[1] 史世杰[1] 丁伟同 庞星轩 张程[1] 王虎[1] 

机构地区：[1]北华航天工业学院材料工程学院,河北廊坊065000

出　　处：《北华航天工业学院学报》2016年第6期15-17,共3页Journal of North China Institute of Aerospace Engineering

基　　金：大学生创新创业训练计划项目(201511629011);北华航天工业学院科研平台项目(KYPT201404);北华航天工业学院教研项目(JY2015021;JY2015038)

摘　　要：与常规镀膜技术相比,磁过滤真空离子镀技术具有无污染、色泽均匀、致密度高、耐蚀、耐磨等特点,其在装饰加工领域的应用日益丰富。本文研究了气体分压与基体负偏压对Ti N膜层的影响。通过对膜基结合强度、硬度、耐磨性、耐蚀性等性能指标的综合考量,得出弧电流65A,N2压强0.4Pa,基体负偏压-200V为最优的生产工艺。Compared with conventional coating technology, the magnetic filtered vacuum ion plating has the advantages of no pollu- tion, uniform color, high density, corrosion resistance, wear resistance. Its application in the field of decorative processing is increas- ing. This paper studies the impact of gas partial pressure and the substrate negative bias on TiN film. Through the comprehensive consideration on the film performance of bonding strength, hardness, wear resistance, corrosion resistance, the optimal production process is obtained in which the arc flow is 65A, the N2 pressure is 0.4Pa, and the substrate negative bias is -200V.

关 键 词：磁过滤真空离子镀 气体分压 基体负偏压 装饰加工 

分 类 号：TG174.444[金属学及工艺—金属表面处理]