氮化铝粉微量元素检测方法研究  

Studies on the Method for Measuring Trace Elements in Aluminum Nitride Powder

作　　者：张浩[1] 崔嵩[1] 田晨光[1] 孙登琼 

机构地区：[1]中国电子科技集团公司第43研究所,安徽合肥230088

出　　处：《中国材料科技与设备》2015年第6期8-10,共3页Chinese Materials Science Technology & Equipment

摘　　要：本文研究了氮化铝（AIN）粉体中主要微量元素含量的测定方法，样品采用了湿法、高压微波消解等四种方法；采用了电感耦合等离子体原子发射光谱法（ICP-AES）进行测定，并研究了不同元素间分析谱线的相互干扰。实验数据表明，采用碱性条件下微波消解处理后，ICP—AEs法测定氮化铝粉中元素含量的相对标准偏差（RSD）均小于2％，回收率在97．O％-103％之间，结果可信度高，为氮化铝粉中多种元素含量测定提供了一个有效的方法。An ICP- AES method for measuring multiple elements in aluminum nitride powder was reported. Effects of four specimen operation techniques e.g. wet digesting, microwave assisted digestion and etc on the ICP-AES measurement were studied, meanwhile, mutual interference among the six elements in the aluminum nitride powder were also investigated. The results show that in terms of the method of microwave assisted digestion under alkaline condition, the relative standard deviations （RSD） of the elements in the aluminum nitride powder are all less than 2% and the recovery ratio are in a range of 97.0-103.0%in the ICP-AES measurement. Therefore, the measuring method has a high accuracy, and provides an effec- tive curve for multiple element measurement of the aluminum nitride powder.

关 键 词：电感耦合等离子体原子发射光谱法 氮化铝粉体 微波消解 

分 类 号：TQ174.4[化学工程—陶瓷工业]