多晶硅生产中废气处理工艺改造  

Reformation of waste gas treatment process in polysilicon production

作　　者：胡小冬[1] 王丽[1] 张东[1] 贾曦[1] 王恒孝 

机构地区：[1]乐山职业技术学院,四川乐山614000 [2]四川新光硅业科技有限公司,四川乐山614000

出　　处：《现代化工》2016年第12期121-123,共3页Modern Chemical Industry

基　　金：四川省循环经济研究中心课题(XHJJ-1407)

摘　　要：针对多晶硅生产中废气处理工艺存在的问题其进行改造,改造后废气中约有92.1%的氯硅烷被回收利用,碱液的月平均消耗量减少约500 t;放空气体中有毒有害成分的质量分数由17.6%降至0.08%;着火和爆炸事故等安全问题已彻底消除,生产系统的稳定性得到改善,多晶硅的月均产量和产品合格率分别提高约13.8%和4.7%。To settle the problem existing in waste gas treatment process for polysilicon production,the original process is reformed. Compared with the original process,about 92. 1% of chlorosilane in waste gas is recycled,and the monthly average consumption of alkali solution is reduced by 500 t. The mass fraction of toxic and harmful pollutants in waste gas is decreased from 17. 6% to 0. 08%. As a result,fire and explosion accidents have been completely eliminated,greatly improving system safety and stability. Furthermore,the monthly average yield and the qualified rates of polysilicon products are increased by 13. 8% and 4. 7%,respectively.

关 键 词：多晶硅 废气 处理 工艺改造 

分 类 号：TQ127.2[化学工程—无机化工]