基于ZnO单晶声表面波压力传感器的特性研究  

Research on characteristic of the surface acoustic wave pressure sensor based on ZnO single crystal

作　　者：吴文琪[1] 胡芳仁[1,2] 杨宇鑫 

机构地区：[1]南京邮电大学光电工程学院,江苏南京210046 [2]南京邮电大学Peter Gruenberg中心,江苏南京210023

出　　处：《微型机与应用》2016年第24期84-86,共3页Microcomputer & Its Applications

基　　金：国家自然科学基金资助项目(61274121,61574080)

摘　　要：基于声表面波(SAW)理论以及SAW谐振器的结构和工作原理,设计了一种基于声表面波(SAW)谐振式压力传感器。采用有限元软件COMSOL Multiphysics对ZnO单晶声表面波谐振器进行建模和仿真,提出符合声表面波振型的对称模态和反对称模态,计算出ZnO单晶的相速度为3 237.31 m/s。讨论了ZnO基底厚度对此压力传感器的相速度的影响,得出ZnO基底厚度越大,相速度越小。最后通过加载0~1 000 kg/m^2的质量块来模拟不同的压力对器件的频率响应的影响,结果显示压力的变化与谐振频率二者具有良好的负相关线性关系。通过拟合得出线性表达式。Based on the theory of surface acoustic wave （SAW） , and the structure and principle of SAW resonator, a SAW resonant pressure sensor is designed. A finite element software COMSOL Muhiphysics was used to model and simulate the single crystal ZnO-based SAW resona- tor. Symmetric mode and anti-symmetric mode of the ZnO-based SAW resonator are established. By calculation, the phase velocity of the ZnO single crystal is 3 237.31m/s by analyzing the resonance response. The effect of the ZnO substrate thickness on the phase velocity of the pres- sure sensor is discussed. It is concluded that the larger the thickness of ZnO, the smaller the phase velocity. Finally,the effect of different pressure to the frequency response is simulated by loading the 0 - 1 000 kg/m2 mass block on the device in order to study the relationship be- tween the pressure and the resonant frequency. The results show that the pressure and the resonant frequency have a good linear relationship. The linear expression can be obtained.

关 键 词：声表面波 ZNO单晶 压力传感器 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术] TP211.51[自动化与计算机技术—计算机科学与技术]