空间磁偏转质谱计校准装置设计及校准方法研究  

Design and calibration method for magnetic sector mass spectrometer calibration apparatus

作　　者：董猛[1] 成永军[1] 李得天[1] 孙雯君[1] 郭美如[1] 赵澜[1] 张瑞芳[1] 吉康[1] 孙健[1] DONG Meng CHENG Yong-jun LI De-tian SUN Wen-jun GUO Mei-ru ZHAO Lan ZHANG Rui-fang JI Kang SUN Jian(Lanzhou Institute of Physics, Lanzho)

机构地区：[1]兰州空间技术物理研究所,甘肃兰州730000

出　　处：《真空》2016年第6期28-33,共6页Vacuum

摘　　要：为确保磁偏转质谱计空间探测应用测量数据的准确性,设计了一套校准装置对磁偏转质谱计进行地面校准。本文介绍了装置的结构设计,并根据校准装置和磁偏转质谱计自身的特点,提出了二种校准方法,分别为:分压力测量法和标样气体法。研究表明,校准装置的极限真空度可达到5×10^(-8)Pa,二种校准方法对应不同的校准范围,可将质谱计的校准下限延伸至10^(-8)Pa,比国内目前已报道的质谱计的校准下限低1~2个量级。In order to insure the measurement veracity of the space magnetic sector mass spectrometer, a calibration apparatus was designed to calibrate the mass spectrometer on the ground. In this paper, the calibration apparatus structure design was given.Additionally, two calibration methods were proposed according to the magnetic sector mass spectrometer characteristics. The two methods were the standard gas calibration method and the partial pressure measurement method, respectively. The preliminary results show that ultimate pressure 10^（-8）Pa can be achieved by the apparatus. The two calibration methods have different calibration range, and the calibration limit can be extended to 5×10^（-8）Pa, which is lower one or two orders of magnitude than that reported by the literatures.

关 键 词：磁偏转质谱计 空间探测 校准装置 校准方法 

分 类 号：TB771[一般工业技术—真空技术]