现场真空校准装置性能研究  

Portable Ultra High Vacuum Apparatus for Field Calibration of Low Pressure System

作　　者：习振华[1] 李得天[1] 成永军[1] 张虎忠[1] 王永军[1] 刘珈彤[1] 管保国[1] 吉康[1] 

机构地区：[1]兰州空间技术物理研究所,兰州730000

出　　处：《真空科学与技术学报》2016年第12期1400-1406,共7页Chinese Journal of Vacuum Science and Technology

摘　　要：研制了一台校准范围为10^(-5)~10~5Pa的现场真空校准装置。将不同种类单一成分的校准气体引入装置上游室,通过几何尺寸为微米量级激光小孔的衰减,建立校准用标准压力p_(std)。上游室压力变化范围为1~10~3Pa,相应地,校准室内对应的标准压力范围10^(-5)~10^(-2)Pa(N2),测量不确定度为2.4%。另外,该装置可采用与标准真空计直接比较进行动态或静态校准,其极限真空度为10^(-6)Pa量级。对装置暴露大气后的抽气性能、静态压升及其主要计量特性进行了实验研究。实验结果表明,该装置外形尺寸以及质量分别为475 mm×420 mm×800 mm、37.8 kg,校准范围为1.9×10^(-5)~1.0×10~5Pa,相对合成标准不确定度为2.8%~0.40%。A portable ultrahigh vacuum （UHV） apparatus （475 mm × 420 mm× 800 mm and 37.8 kg） was developed for onsite calibration of pressure gauges in 10^-5- 10^5 Pa range. The pressure attenuation unit provides a standard pressure （Pstd） of different gases, and the calibration gas goes through the laser-drilled, μm-sized orifice into the calibration chamber. The pstd, ranging from 10^-5 to 10^-2 Pa （nitrogen equivalent pressure） ,can be obtained by changing the upstream pressure from 1.0 to 10^3 Pa with an uncertainty of 2.4%. In addition,the calibration,typ- ically in 10^-6 Pa range,can also be performed by direct comparison with a reference gauge either in static or station- ary equilibrium. The pump-down and static characteristics of the novel apparatus after exposure to ambient air were evaluated. The results show that the new apparatus is capable of repeatedly and reliably calibrating a pressure in 1.9 × 10 ^-5 - 1.0 × 10^5 Pa range with the relative combined standard standard uncertainty from 2. 8% to 0. 40%.

关 键 词：现场校准 压力衰减法 直接比较 计量特性 

分 类 号：TB771[一般工业技术—真空技术]