应用于集成传感器的高精度接口芯片设计  

High Precision Interface Chip for Integrated Sensor

作　　者：宋敏[1] 邹雪城[1] 东振中 杨存孝 谢永强 沈绪榜[3] SONG Min ZOU Xue-cheng DONG Zhen-zhong YANG Cun-xiao XIE Yong-qiang SHEN Xu-bang(School of Optical and Electronic Information, Huazhong University of Science ＆ Technology, Wuhan 430074, China Trimode Company, Wuhan 430073, China School of Automation, Huazhong University of Science ＆ Technology, Wuhan 430074, China)

机构地区：[1]华中科技大学光学与电子信息学院,湖北武汉430074 [2]武汉群茂科技公司,湖北武汉430074 [3]华中科技大学自动化学院,湖北武汉430074

出　　处：《仪表技术与传感器》2016年第12期9-12,共4页Instrument Technique and Sensor

摘　　要：针对集成传感器接口信号微弱,对低频噪声敏感的特性,设计了一种高精度低失调的传感器接口芯片。采用嵌套斩波运放可编程增益放大器结构,隔离放大传感器感测到的模拟信号。ADC采用增量三阶单环单比特量化sigma-del ta调制器,积分电路运用了相关双采样技术,有效抑制了传感器接口电路的低频噪声。芯片采用0.18μm CMOS双层多晶硅五层金属工艺实现,测试结果表明,增量sigma-delta ADC的SNDR达到了90.8 d B,有效位数达到14.79位。In view of the weak signal of the interface of the integrated sensor, noise sensitivity of low frequency, a high preci- sion and low offset sensor interface chip was designed.Using nested chopper op-amp structure of programmable gain amplifier,analog signal was isolated amplified by sensor sensing. The ADC was based on a 3 order 1-bit quantizer incremental sigma-delta modulator, which can suppress low frequency noise with correlated double sample （CDS）circuits.The chip was fabricated by 0. 18 μm CMOS double level polysilicon five layers metal technology.The test results show SNDR of the incremental sigmce-delta ADC achieves 90.8 dB and reaches 14.79 bit ENOB.

关 键 词：集成传感器 嵌套斩波 SIGMA-DELTA调制器 相关双采样 

分 类 号：TN47[电子电信—微电子学与固体电子学]