激光分子束外延制备中高温超导薄膜化学稳定性研究  

Chemical stability of high temperature superconducting thin films prepared by laser molecular beam epitaxy

作　　者：熊泽本[1,2] 马世红[2] 武彪[1] 

机构地区：[1]荆楚理工学院数理学院,湖北荆门448000 [2]复旦大学物理学系,上海200433

出　　处：《激光杂志》2017年第1期39-42,共4页Laser Journal

基　　金：地方高校国家级大学生创新创业训练计划项目(201511336009);湖北省大学生创新创业训练计划项目(201511336019)

摘　　要：提出一种激光分子束薄膜制备方法,并对制备完成的高温超导薄膜化学稳定性进行研究。以活化气体作为薄膜制备的氧源,选用Sr Ti O3基片作为衬底,临界转变温度和临界电流密度分别控制为85K、1×106A/cm2。分析薄膜的化学稳定性,分析结果显示如果薄膜中含有微量的未反应单质铝,会导致薄膜的化学稳定性发生变化;采用激光分子束制备的薄膜化学稳定性优于内部结构疏松的非晶膜。实验证明采用提出的激光分子束薄膜制备方法生成的高温超导薄膜具有较好的化学稳定性。A new method for the preparation of laser molecular beam is proposed, and the chemical stability of high temperature superconducting thin film prepared by the method is studied. As the oxygen source, the SrTiO3 substrate was selected as the substrate, the critical transition temperature and the critical current density were Tc0 = 85K and 1 ×10^6A/cm^2, respectively. The chemical stability of the film was analyzed, analysis results show that if there is not a trace of elemental aluminum reaction in the film, will lead to the change of the chemical stability of thin film ; amorphous film by laser molecular beam preparation chemical stability of the film is better than that of the internal structure of osteoporosis. The experimental results show that the high temperature superconducting thin film prepared by the method of laser molecular beam preparation has good chemical stability.

关 键 词：激光分子束 外延 薄膜 临界转变温度 临界电流密度 

分 类 号：TN27[电子电信—物理电子学]