采用Zygo干涉仪测量LCOS相位调制特性的研究  

Research of Measuring Phase Modulation Characteristic of LCOS by Zygo Interferometer

作　　者：殷路安 朱力行[1] 吴建宏[1] 

机构地区：[1]苏州大学物理与光电.能源学部,江苏苏州215000

出　　处：《实验科学与技术》2016年第6期43-45,92,共4页Experiment Science and Technology

基　　金：江苏省高等学校大学生实践创新训练计划项目

摘　　要：该文介绍了LCOS的基本结构和光波调制原理,当光波的偏振方向与液晶分子的光轴相一致时,LCOS处于纯相位调制模式。介绍了Zygo干涉仪测量相位差的原理,针对北京杏林睿光公司生产的RL-SLM-R2反射式纯相位LCOS采用美国Zygo干涉仪进行了相位调制特性测量,并根据干涉仪原理对结果进行修正,得到了准确的相位调制特性曲线,其调制范围为0-0.715 4λ。该实验开创了一种新的相位调制度测量方法,对更好地使用液晶空间光调制器有重要意义。This paper introduces the basic structure and light wave modulation principle of liquid crystal on silicon（ LCOS） device. When the polarization direction of light wave is accordant with the optic axisof liquid crystal polymer,LCOS is under phase- only modulation model. This paper also introduces the principle of Zygo interferometer phase-difference measurement,measures the phase modulation characteristics with American Zygo interferometer of RL-SLM-R2 reflection pure-phase LCOS produced by Beijing Reallight Technology Co.,Ltd,revises the measuring results according to the interferometer principle,and gets the accurate phase characteristic curve,of which the modulation range is 0-0. 7154λ. This experiment creates a new method for measuring phase modulation,which can help better utilize LCOS.

关 键 词：信息光学 液晶空间光调制器 纯相位调制 Zygo干涉仪 调制特性 

分 类 号：O436.1[机械工程—光学工程] O753.2[理学—光学]