基于光散射及灰度值作为判据的光学薄膜激光损伤阈值测量系统  

Laser-induced damage threshold test system based on light scattering and grey level of image

作　　者：孟令强[1] 王青[2] 张莉萍[1] 齐思璐 王晓烨[1] 

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094 [2]南京理工大学先进发射协同创新中心,江苏南京210094

出　　处：《光学仪器》2016年第6期534-538,共5页Optical Instruments

摘　　要：基于ISO11254国际标准,构建了基于半导体激光光散射检测光学薄膜损伤与否的光学薄膜激光损伤阈值测试系统。运用图像处理以及灰度值作为判断薄膜损伤与否的判据,对TiO2/SiO2增透膜进行了阈值测试。由图像处理可得,当光斑图像有效区域内灰度值最大的前50个像素点的平均灰度值在25到33之间时,该区域为薄膜损伤的临界区域,并将测量结果与在Veeco白光轮廓仪观测到的损伤形貌进行对比,具有较好的一致性。The laser-induced damage threshold test system has been constructed according to the international standard of ISO 11254, which is based on the measurement of the scattered light of the diode laser. Image processing algorithm and the grey level of the image have been used to judge whether the film has been damaged. The threshold of anti-reflection coating deposited by TiO2 and SiO2 was performed according to ISO 11254 standard ensuring the critical area of grey level is between 25 and 33 in the test system. The measured results were compared with that of scanning white-light interferometry profilometer. Both of them have a preferable consistency.

关 键 词：光学薄膜 激光损伤阈值 光散射 图像处理 灰度值 

分 类 号：TH74[机械工程—光学工程]