Effects of fabrication errors on diffraction efficiency for a diffractive membrane  

作　　者：王若秋 张志宇 国成立 薛栋林 张学军 

机构地区：[1]Key Laboratory of Optical System Advanced Manufacturing Technology of the Chinese Academy of Sciences, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China [2]University of Chinese Academy of Sciences, Beijing 100049, China

出　　处：《Chinese Optics Letters》2016年第12期30-35,共6页中国光学快报（英文版）

基　　金：supported by the National 973 Program of China(No.2011CB013205);the National Natural Science Foundation of China(No.51305422)

摘　　要：The demand for space-borne telescopes with an aperture of 20 m is forcing the development of large diameter diffractive Fresnel zone lenses（FZLs） on membranes. However, due to the fabrication errors of multi-level microstructures, the real diffraction efficiency is always significantly smaller than the theoretical value. In this Letter,the effects of a set of fabrication errors on the diffraction efficiency for a diffractive membrane are studied. In order to verify the proposed models, a 4-level membrane FZL with a diameter of 320 mm is fabricated. The fabrication errors of the membrane FZL are measured, and its diffraction efficiency in the ＋1 order is also tested.The results show that the tested diffraction efficiency is very close to the calculated value based on the proposed models. It is expected that the present work could play a theoretical guiding role in the future development of space-borne diffractive telescopes.The demand for space-borne telescopes with an aperture of 20 m is forcing the development of large diameter diffractive Fresnel zone lenses（FZLs） on membranes. However, due to the fabrication errors of multi-level microstructures, the real diffraction efficiency is always significantly smaller than the theoretical value. In this Letter,the effects of a set of fabrication errors on the diffraction efficiency for a diffractive membrane are studied. In order to verify the proposed models, a 4-level membrane FZL with a diameter of 320 mm is fabricated. The fabrication errors of the membrane FZL are measured, and its diffraction efficiency in the ＋1 order is also tested.The results show that the tested diffraction efficiency is very close to the calculated value based on the proposed models. It is expected that the present work could play a theoretical guiding role in the future development of space-borne diffractive telescopes.

关 键 词：fabrication overlay aperture verify borne registration deviation etching Fresnel relaxation 

分 类 号：V447[航空宇航科学与技术—飞行器设计]