一种多距离融合的大深度测量范围相移阴影叠栅轮廓术  

A Multi-Range Merging Method for Phase Shift Shadow Moiré Profilometry with Large Depth Measuring Range

作　　者：艾永旭 周翔[1,2] 杜虎兵[3] 郭家玉[1] 费梓轩 李东[1] 

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,陕西西安710049 [2]西安交通大学苏州研究院,江苏苏州215123 [3]西安工业大学机电工程学院,陕西西安710021

出　　处：《光学学报》2016年第12期90-96,共7页Acta Optica Sinica

基　　金：国家自然科学基金(61471288);中央高校基本科研业务费专项资金;苏州市应用基础研究项目(SYG201545)

摘　　要：针对传统阴影叠栅轮廓术深度测量范围有限的问题,根据阴影叠栅条纹对比度的变化特点,提出了大深度范围内的阴影叠栅轮廓新型测量方法。该方法将光栅置于不同的高度,在物体表面形成叠栅条纹,通过将不同高度范围内的条纹相位测量结果相互融合,实现了大深度范围内的阴影叠栅轮廓测量。分析了光栅处于不同位置时叠栅条纹的相位分布特点,提出了基于重叠区域的相位融合方法和误差补偿方法。通过实验验证了所提出方法的可行性和准确性。The depth measuring range is limited by conventional shadow moiréprofilometry.In order to solve the problem,a new method of shadow moiréprofilometry,which can increase the depth measuring range,is proposed according to the fringe contrast characteristic of shadow moiré.When the grating is placed at different depths,moiréfringes will be formed on the surface.The shadow moiréprofilometry with large depth measurement range is realized by merging the fringe phase measurement results of different depth ranges.The phase distributions of moiréfringes at different depths are analyzed. Methods for phase merging and error compensation are proposed based on the overlapping region.The feasibility and veracity of the proposed method are verified by experiments.

关 键 词：测量 深度测量范围 阴影叠栅轮廓术 相位融合 TALBOT效应 叠栅迭代误差补偿 

分 类 号：O439[机械工程—光学工程]