基于微环谐振腔的可调谐硅基反射腔镜  

Tunable Silicon Reflection Cavity Mirror Based on Microring Resonator

作　　者：李霞[1] 王超[1] 余辉[1] 江晓清[1] 

机构地区：[1]浙江大学信息与电子工程学院,浙江杭州310027

出　　处：《光学学报》2016年第12期259-264,共6页Acta Optica Sinica

基　　金：国家973计划(2013CB632105);国家自然科学基金(61177055;61307074);浙江省杰出青年基金(LR15F050002)

摘　　要：针对片上光互连用光源对谐振腔单色性、可调性的要求,基于互补金属氧化物半导体技术和绝缘衬底上的硅材料,设计并制作了一种基于微环谐振腔的可调谐硅基反射腔镜。利用转移矩阵方法分析了该反射腔的性能,发现该反射腔具有较好的尖锐度和消光比。实验结果表明,该反射腔在波长1549nm处反射率可达90%,品质因素Q值为3×104,自由光谱范围（FSR）为9.6nm。通过对微环谐振腔进行热光调制,在0~40.5mW功率范围内实现了在FSR内的波长可调。Considering the requirement of monochromaticity and tunability for resonator used in on-chip optical interconnect source,we design and make a tunable silicon reflection cavity mirror based on microring resonator,using complementary metal-oxide-semiconductor technology and silicon material on insulating substrate.The performance of the reflection cavity is analyzed by the transfer-matrix method,and we find that the reflection cavity shows good properties in sharpness and extinction ratio.The experimental results show that the reflectivity of the reflection cavity can reach 90% at the wavelength of 1549 nm,the quality factor is 3×104,and the free spectral range（FSR）is 9.6nm.By applying the thermo-optic modulation to the microring resonator,the wavelength tunability in FSR can be realized within the power range of 0-40.5mW.

关 键 词：光学器件 反射腔 热调特性 微环谐振腔 

分 类 号：TN256[电子电信—物理电子学]