一种适用于ISFET阵列集成检测系统的读出电路设计  

Design for Readout Circuit of ISFET Array Integrated Test System

作　　者：呼红阳 毕津顺[2] 李正平[1] 李云肖 石聪[1] 赵爽[1] 金虎[1] 牛文成[1] 岳钊[1,3] Hu Hongyang Bi Jinshun Li Zhengping Li Yunxiao Shi Cong Zhao Shuang Jin Hu Niu Wencheng Yue Zhao(Department of Microelectronics, College of Electronic Information and Optical Engineering, Nankai University, Tianjin 300350, China Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics of Chinese Academy Sciences, Beijing 100029, China Tianjin Key Laboratory of Photoelecm＇c Sensor and Sensor Network Technology, TianJin 300350, China)

机构地区：[1]南开大学电子信息与光学工程学院微电子工程系,天津300350 [2]中国科学院微电子研究所微电子器件与集成技术重点实验室,北京100029 [3]天津市光电传感器与传感网络技术重点实验室,天津300350

出　　处：《南开大学学报（自然科学版）》2016年第6期69-73,79,共6页Acta Scientiarum Naturalium Universitatis Nankaiensis

基　　金：国家自然科学基金(61471207);天津市自然科学基金(14JCYBJC16700);中国科学院微电子器件与集成技术重点实验室课题基金

摘　　要：ISFET(Ion Sensitive Field Effect Transistors)是1种可与CMOS工艺兼容的离子敏感场效应晶体管.随着传感器阵列集成度的不断增加,鉴于响应速度、功耗和成本的局限性,单个ISFET的检测电路不适于大规模集成化的检测系统.从集成化的角度出发,在分析多个读出电路的基础上,比较各自的性能特点,得出1种脉冲宽度调节读出电路,在功耗、转换速度和结构方面都有优势,适合于大规模ISFET传感器阵列的数据读取.并应用分立元件对电路性能进行了验证,通过FPGA采集读出电路输出数据,验证其具有良好的稳定性和可行性.ISFET（Ion Sensitive Field Effect Transistors） is an ion sensitive device for different biological and chemical detections.As it is compatible with standard CMOS processes,the sensing performances and power consumption of ISFET sensors can be improved by miniaturizations and integrations of different ISFETs and corresponding readout circuits.With the number increasing,the traditional single ISFET readout circuit is not suitable for large-scale integrated ISFET sensing arrays in consideration of the response speed,the limitation of the power consumption and the cost.The characteristics of different circuits for integrated ISFET sensing systems were analyzed and compared in details.Then a novel readout circuit was designed for ISFET arrays,which showed better performances in power consumption and transformation speed than other circuits.Finally,the feasibility and advantages of our designed ISFET array readout circuits were proved by FPGA based sensing system.

关 键 词：ISFET传感器阵列 PH检测 读出电路 FPGA 

分 类 号：TN386[电子电信—物理电子学]