聚合物辅助设计生长高质量多功能薄膜  

Design and Growth of High-Quality Multifunctional Thin Films by Polymer-Assisted Deposition

作　　者：易庆华 赵杰[1] 娄艳辉[1] 邹贵付[1] 刘忠范[2] YI Qing-Hua ZHAO Jie LOU Yan-Hui ZOU Gui-Fu LIU Zhong-Fan(College of Physics, Optoelectronics and Energy, Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215006, Jiangsu Province, P R. China College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, P R. China)

机构地区：[1]苏州大学物理与光电·能源学部,苏州纳米科技协同创新中心,江苏苏州215006 [2]北京大学化学与分子工程学院,北京100871

出　　处：《物理化学学报》2017年第2期314-328,共15页Acta Physico-Chimica Sinica

基　　金：国家重点基础研究发展规划项目(973)(2015CB358600);国家自然科学基金优秀青年基金(21422103)资助~~

摘　　要：随着薄膜材料的日益发展和新型薄膜材料的不断涌现,开发薄膜生长技术对于半导体和光电等科技领域的作用日益突出。本文主要介绍最近发展的聚合物辅助沉积从分子层面上控制生长高质量的薄膜材料。聚合物辅助沉积是一种生长高质量薄膜的化学水性溶液方法,将金属离子与聚合物通过络合、氢键或静电等方式形成一种均匀稳定的前驱体溶液,再经过超滤、成膜和热处理形成高质量的金属氧化物、金属碳化物、金属氮化物、金属单质、金属硫/硒化物等薄膜以及纳米粒子等化合物或复合功能材料。该方法中水溶性的聚合物能通过络合作用抑制金属离子的水解使得溶液稳定,并能精确控制薄膜的组分从而形成高质量的薄膜。该化学溶液方法的提出为科学技术领域提供了一种低成本和大面积制备薄膜的技术路线。本文最后总结和展望了聚合物辅助沉积法未来的挑战和发展方向。With the development of thin film technology, new methods to grow thin films is emerging. This review introduces one type of polymer-assisted deposition to grow thin films. Polymer-assisted deposition is one of the chemical solution ways to grow high-quality thin films. In this process, metal ions coordinate with a polymer by covalent bonding, hydrogen bonding, or static electricity to form a stable precursor. The controllable viscosity and homogeneous solution system ensure high-quality growth of thin films or nanoparticles. The diverse components of thin film range from a metal-oxides, metal-carbides, metal-nitrides, metal-sulfides/selenides to elementary substance （e.g. metals） even dopant composites. This method provides an alternative strategy to grow thin films. In addition, the prospects and challenges of the polymer-assisted deposition are discussed in the review as well.

关 键 词：聚合物 薄膜 半导体 化学溶液法 复合功能材料 

分 类 号：TB383.2[一般工业技术—材料科学与工程]