LC温度传感器的高温性能优化与设计  

Performance Optimization and Design of the LC Temperature Sensor at High Temperature

作　　者：唐顺[1,2] 谭秋林[1,2] 王海星[1,2] 宋瑞佳[1,2] 伍国柱[1,2] 熊继军[1,2] 

机构地区：[1]中北大学电子测试技术重点实验室,太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《微纳电子技术》2017年第2期96-100,共5页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61471324;51425505);山西省青年拔尖人才支持计划

摘　　要：研究了高温环境下LC温度传感器信号强度减弱的原因,并根据分析结果设计了一种适合在高温环境工作的无线无源温度传感器。通过对传感器建模分析,研究了各参数随温度变化对传感器品质因数Q的影响,并且根据分析结果优化相关参数,提高传感器在高温下的信号强度。传感器采用氧化铝陶瓷作为基底材料,并利用丝网印刷技术将LC谐振电路制作在基底材料上。最后搭建高温测试平台,对传感器进行了高温性能测试。测试结果表明传感器能稳定工作在最高900℃的高温环境下,并且具有较高的信号强度。The reason of the signal strength reduction for the LC temperature sensor in the high temperature environment was studied, and a wireless passive temperature sensor for high tempera- ture environment was designed according to the analysis results. The effect of the parameters variation with the temperature on the quality factor Q was investigated by the modeling analysis, and based on the analysis results, the related parameters were optimized to enhance the signal strength at high temperature. Alumina ceramic was used as the substrate for the sensor, and the LC resonance circuits were fabricated on the substrate by the screen printing technology. Finally, a high temperature test platform was set up to test the high temperature performance of the sen- sor. The test results show that the sensor can work stably in the high temperature environment up to 900℃ with a high signal strength.

关 键 词：无线无源 LC温度传感器 品质因数 高温 谐振频率 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]