基于塑料镜片防水加硬抗老化光学薄膜的研制  

Fabrication of anti-water hard and anti-aging optical film based on plastic lens

作　　者：付秀华[1] 刘禹冰[1] 熊仕富[1] 郭贵新 杨永亮[1] 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022

出　　处：《应用光学》2017年第1期83-88,共6页Journal of Applied Optics

基　　金：贵州省科学技术基金(黔科合J字[2014]2148);贵州省"125计划"重大科技专项项目(黔教合重大专项字[2014]037);吉林省重大科技攻关专项(21040203002GX);国家高技术研究发展计划(12349876)资助

摘　　要：为了解决现有光学塑料镜片表面易划伤、高温时容易发生膜裂的问题,选取机械性能稳定的Ti_3O_5、SiO_2作为高、低折射率材料,依据光学薄膜理论,采用TFCalc软件设计膜系,通过电子束加热蒸发和离子源辅助沉积薄膜,在膜系的最外层用电阻加热法镀制防水膜。通过选择新材料SV-55作为连接层,增强了塑料镜片与膜层的附着力,解决了膜系与塑料镜片膨胀系数不匹配的问题,提高了塑料镜片的抗温能力。通过优化工艺参数,得到400nm^700nm反射率R≤1%的绿色减反膜。测试结果显示,研制的薄膜具有耐摩擦、抗老化、防水和防油污的特性。Aiming at solving the problem that surface of optical plastic is easy to be scratched, will have film crack at high temperature, Ti3O5 and SiO2 are selected as high and low refractive index coating material because of its stable mechanical properties in room temperature in this paper. According to theory of thin film, TFCalc software are used to achieve film system design, and electron beam evaporation and ion beam assist deposition are used to deposit coating material Finally, new anti-water fluorine material are deposited by resistance depositing. Through selecting new material SV-55 as connecting layer, adhesion of plastic lens and film is enhanced and problem of SiO2 and plastic lens expansion coefficient mismatch is solved,which improves ability of temperature resistance of plastic lenses. Through continuous optimization of experimental parameters, reflectivity of green antireflection film is less than or equal to 1 at 400 nm-700 nm. Results show that, plastic lenses have the ability to resist friction, aging and hydrophobicity, and can be widely used.

关 键 词：光学薄膜 光学塑料 减反膜 离子源辅助沉积 

分 类 号：TN305.8[电子电信—物理电子学] O484[理学—固体物理]