精密气浮工作台动态特性仿真与优化  

Simulation and Dynamic Characteristic Optimization of the Ultra-precision Stage with Air-bearing

作　　者：文明[1] 姚勇[1] 何康昊[1] 陈华明[1] 杨雷[1] 邓立[1] 李佩龙[1] 姜飞[1] 

机构地区：[1]中国工程物理研究院材料研究所,四川绵阳621900

出　　处：《机床与液压》2017年第2期20-24,共5页Machine Tool & Hydraulics

摘　　要：为提高精密气浮工作台的工作性能,在分析气浮轴承承载特性的基础上,对气浮工作台进行多体动力学建模与仿真。参数化多体动力学模型,创建模型的设计变量与目标变量,编写目标变量评价程序,使用Isight集成了优化仿真模型,优化了设计变量,提高了工作台的稳定性,缩短了工作台的收敛时间。优化结果表明:对工作台的优化设计改善了工作台的稳定性,减小了工作台在步进扫描过程中的收敛时间与振幅。To improve the work performance of the ultra-precision stage with air-bearing, based on the analysis of bearing capacity of the air-bearing, the multi-body dynamic modeling and simulation for the ultra-precision stage with air-bearing were performed. The dynamic model was parameterized, the design variable and target variable were created, and the evaluation program was compiled. Op-timization model was also established based on Isight and parameter optimization design of precision stage was carried on the platform. The optimization results manifest that the stability of the stage is improved, the convergence time and the amplitude of the stage are de-creased.

关 键 词：精密气浮工作台 动态特性 参数优化 

分 类 号：TP391.72[自动化与计算机技术—计算机应用技术]