用于质谱分析的微量气体自动进样装置的研制  

Development of An Automatic Gas Sampler for Trace Analysis by Mass Spectrometer

作　　者：李立武[1] 国连杰[1] 夏燕青[1] 妥进才[1] 

机构地区：[1]甘肃省油气资源研究重点实验室/中国科学院油气资源研究重点实验室中国科学院地质与地球物理研究所,兰州750000

出　　处：《现代科学仪器》2016年第6期85-89,共5页Modern Scientific Instruments

基　　金：国家自然科学基金（41473062）,甘肃省重点实验室专项（1309RTSA041）资助

摘　　要：一般通过毛细管将常压或低压的气体样品引入质谱仪，进行气体化学组成或同位素组成质谱分析。当气体量很少时，不便于通过毛细管引入样品，所以研制了高真空气体自动进样装置。开展了气体总量、微升量气体组分和毫升量气体中微量组分的分析测试。将该气体自动进样装置与气体组分四极质谱仪连用，检测了微升量级到毫升量级气体的总量、微升量级气体的组分和毫升量级气体中的微量组分，微升量级气体的组分含量检测限达到ppm（10^-6V／V）级，毫升量级气体中微量组分的含量与质谱响应之间表现了良好的线性关系。Gas composition mass spectrometer is a common instrument for gas analysis. Gas samples is usually in normal pressure, sometimes in low vacuum, while gas mass spectrometer usually works under high vacuum state, so we need aninlet device to introduce the normal pressure or low vacuum gas sample into the mass spectrometer, and to maintain the high vacuum work state of mass spectrometer.Here, detail instruction of the self-developed gas automatic inlet device is present, which includesthe hardware and software of the high vacuum valve automatic control and gas pressure measurement. The total gas pressure measurement, component quantitative in micro liter gas and trace component quantitative in ml gas analysis is test. Thedata processing method of gas component quantitative is probed The gas automatic inlet device combined with a quadruple mass spectrometer can analyzenormal contentcomponent in ml level sample, and trace content component in micro liter level sample. The content detection limit gas reachesto ppm （10-6V/V）. A good linear relationship between the content of trace component in spectrometry response is showed. of microliter level ml gas and mass

关 键 词：微量气体 自动进样 四极质谱仪 MAT271 VISUAL Basic 

分 类 号：O657.63[理学—分析化学]