Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph  

作　　者：Ru Wang Xiangxian Wang Hua Yang Yunping Qi 王茹;王向贤;杨华;祁云平(School of Science,Lanzhou University of Technology;College of Physics and Electronic Engineering,Northwest Normal University)

机构地区：[1]School of Science, Lanzhou University of Technology, Lanzhou 730050, China [2]College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China

出　　处：《Chinese Physics B》2017年第2期213-217,共5页中国物理B（英文版）

基　　金：Project supported by the National Natural Science Foundation of China(Grant No.61505074);the National Key Basic Research Program of China(Grant No.2013CBA01703);the Hong Liu Young Teachers Training Program Funded Projects of Lanzhou University of Technology(Grant No.Q201509)

摘　　要：This paper presents the theoretical investigation of hierarchical sub-wavelength photonic structures with various periods and numbers of layers, which were fabricated using a high-order waveguide-mode interference field. A 442-nm laser was used to excite high-order waveguide modes in an asymmetric metal-cladding dielectric waveguide structure. The dispersion curve of the waveguide modes was theoretically analyzed, and the distribution of the interference field of high-order waveguide modes was numerically simulated using the finite-element method. The various dependences of the characteristics of hierarchical sub-wavelength photonic structures on the thickness and refractive index of the photoresist and the waveguide mode were investigated in detail. These hierarchical sub-wavelength photonic structures have various periods and numbers of layers and can be fabricated by a simple and low-cost method.This paper presents the theoretical investigation of hierarchical sub-wavelength photonic structures with various periods and numbers of layers, which were fabricated using a high-order waveguide-mode interference field. A 442-nm laser was used to excite high-order waveguide modes in an asymmetric metal-cladding dielectric waveguide structure. The dispersion curve of the waveguide modes was theoretically analyzed, and the distribution of the interference field of high-order waveguide modes was numerically simulated using the finite-element method. The various dependences of the characteristics of hierarchical sub-wavelength photonic structures on the thickness and refractive index of the photoresist and the waveguide mode were investigated in detail. These hierarchical sub-wavelength photonic structures have various periods and numbers of layers and can be fabricated by a simple and low-cost method.

关 键 词：sub-wavelength photonic structure finite-element method waveguide modes lithography 

分 类 号：TN25[电子电信—物理电子学]