Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing  

作　　者：Ting-Yang Yan Xiang Shen Rong-Ping Wang Guo-Xiang Wang Shi-Xun Dai Tie-Feng Xu Qiu-Hua Nie 颜庭阳;沈祥;王荣平;王国祥;戴世勋;徐铁峰;聂秋华(Laboratory of Infrared Material and Devices, Advanced Technology Research Institute, Ningbo University, Ningbo 315211, China Key Laboratory of Photoelectric Materials and Devices of Zhejiang Province, Ningbo 315211, China The Australian National University, Canberra, ACT 2600, Australia)

机构地区：[1]Laboratory of Infrared Material and Devices, Advanced Technology Research Institute, Ningbo University, Ningbo 315211, China [2]Key Laboratory of Photoelectric Materials and Devices of Zhejiang Province, Ningbo 315211, China [3]The Australian National University, Canberra, ACT 2600, Australia

出　　处：《Chinese Physics B》2017年第2期274-279,共6页中国物理B（英文版）

基　　金：Project supported by the National Natural Science Foundation of China(Grant No.61377061);the Public Project of Zhejiang Province,China(Grant No.2014C31146);sponsored by K.C.Wong Magna Fund in Ningbo University,China

摘　　要：Chalcogenide glasses have shown promise in fabricating mid infrared（MIR） photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low,making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutions.Chalcogenide glasses have shown promise in fabricating mid infrared（MIR） photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low,making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutions.

关 键 词：chalcogenide glasses hot embossing rib waveguides MIR sensing 

分 类 号：TQ171.6[化学工程—玻璃工业]