集成电路温度传感器技术研究进展  

Research Progress of IC Temperature Sensors

作　　者：任芳[1] 徐婉静[1] 赖凡[1] 张杨波[1] 王文捷[1] 邱盛[1] 

机构地区：[1]中国电子科技集团公司第二十四研究所,重庆400060

出　　处：《微电子学》2017年第1期110-113,共4页Microelectronics

摘　　要：与传统传感器相比,集成电路温度传感器具有设计简单、集成度高、响应速度快、精度高、功耗小、体积小、成本低廉等优点,在计算机、通信、电信及工业控制等领域得到广泛的应用。介绍了集成电路温度传感器的技术现状,并以CMOS传感器为重点,从敏感元件、电路设计、制造工艺、高温应用等方面,探讨了智能温度传感器精度控制的关键之处。Compared with the traditional sensors, the IC temperature sensors have the advantages of simple design,high integration, fast response speed, high accuracy, low consumption, small volume, low cost, etc. They have been widely used in computer, communications, telecommunications, industrial control and other fields. The status of IC temperature sensor technology was proposed. Focusing on CMOS sensors of the sensing elements,the key technologies of accuracy control of intelligent temperature sensors were discussed from the sensing element, circuit design, manufacturing process, high temperature applications, etc.

关 键 词：集成电路 温度传感器 CMOS工艺 精度控制 

分 类 号：TN432[电子电信—微电子学与固体电子学]