飞秒激光烧蚀YAG单晶表面的表征  

Study on femtosecond laser induced damage on YAG single crystal surface

作　　者：李长青[1] 王树成[1] 周玉锋[2] 刘宝良[1] Li Changqing Wang Shucheng Zhou Yufeng Liu Baoliang(School of Material Science ＆ Engineering, Heilongjiang University of Science ＆ Technology, Harbin 150022, China Center for Composite Materials ＆ Structure, ltarbin lnslitute of Technology, Harbin 150080, China)

机构地区：[1]黑龙江科技大学材料科学与工程学院,哈尔滨150022 [2]哈尔滨工业大学复合材料与结构研究所,哈尔滨150080

出　　处：《黑龙江科技大学学报》2016年第5期541-545,共5页Journal of Heilongjiang University of Science And Technology

基　　金：国家自然科学基金项目(11572113);黑龙江省教育厅科学技术研究项目(12531586)

摘　　要：在飞秒激光作用下,对损伤YAG单晶表面的形貌特征及其损伤阈值进行分析,对YAG单晶表面的临界电场阈值进行计算。采用光学显微镜、原子力显微镜及扫描电镜对飞秒激光损伤的YAG单晶表面的烧蚀坑形貌进行表征。研究表明:YAG单晶表面的烧蚀坑呈现周期表面结构,在130 fs脉宽、中心波长为800 nm、单脉冲能量在80~580μJ条件下,飞秒激光测试的YAG单晶的损伤阈值为4.24 J/cm^2,计算获得了YAG单晶表面的电场临界阈值。This paper is concerned with an investigation into morphologies and damage threshold of YAG single crystal surface damaged by femtosecond laser,the computation of threshold electric field,and the characterization of morphologies of craters on YAG single crystal surface induced by femtosecond laser by optical microscopy,atomic force microscopy and scanning electrical microscopy. The results show that the crater on the surface of YAG single crystal is laser-induced periodic surface structures（ LIPSS）,the damage threshold of YAG single crystal is 4. 24 J/cm^2 under 130 fs pulse duration,800 nm mid wavelength,single pulse energy in range of 80 ~ 580 μJ,leading to the threshold electric field of YAG single crystal.

关 键 词：飞秒激光 YAG晶体 损伤阈值 烧蚀坑 电场临界阈值 

分 类 号：TB331[一般工业技术—材料科学与工程] TN249[电子电信—物理电子学]