非晶Ti-B基涂层的力学和耐蚀性能研究  

Corrosion Resistance and Hardness of Amorphous Ti-B Based Coatings

作　　者：徐相英 葛芳芳[2] 李朋[2] 舒瑞[2] 黄峰[2] 李谋成[1] XU Xiangying GE Fangfang LI Peng SHU Rui HUANG Feng LI Moucheng(Materials Science and Engineering, Shanghai University, Shanghai 200072, China Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China)

机构地区：[1]上海大学材料科学与工程学院,上海200072 [2]中国科学院宁波材料技术与工程研究所,宁波315201

出　　处：《中国腐蚀与防护学报》2016年第6期573-579,共7页Journal of Chinese Society For Corrosion and Protection

基　　金：国家重点基础研究发展计划项目(2014CB643302);宁波市自然科学基金项目(2015A610050)资助

摘　　要：采用磁控溅射技术,分别在康宁玻璃、硅片和NdFeB合金基材表面沉积一层非晶的Ti-B基涂层。非晶Ti-B基涂层可以消除磁控溅射常见的柱状晶结构。利用XRD,SEM,纳米压痕仪和电化学工作站对涂层的结构、力学性能和耐蚀行为进行表征。结果表明:通过工艺控制,获得了密度分别为4.04,4.27和4.61 g/cm^3的Ti-B基涂层。所获得的Ti-B基涂层呈现均匀、致密的非晶结构,消除了常见的柱状晶结构。非晶Ti-B基涂层的力学和耐蚀性能与其密度紧密相关。当密度提高14.11%时,硅片基底涂层的硬度提高了49.01%,NdFeB基底涂层的腐蚀电流密度降低了66.67%。当密度为4.61 g/cm^3时,Si片上涂层的硬度和塑性指数分别是30.1 GPa和0.48;对于NdFeB基底在3.5%(质量分数)NaCl溶液中腐蚀电流密度为1.34×10^(-6)A/cm^2,约为纯基材腐蚀电流密度的1/8;腐蚀电位为-0.689 V,相对于基材正移0.220 V。说明该非晶涂层对NdFeB基材具有较好的耐蚀保护作用。Amorphous Ti-B based coatings with various densities were deposited on various sub- strates, i. e. Eagle glass, silicon slice and NdFeB alloy respectively, by means of magnetron sputter- ing, and then their structure, hardness and corrosion resistance were characterized by X-ray diffrac- tion （XRD）, scanning electron microscope （SEM）, nanoindentation tester, and Modulab electro- chemical workstation. The results show that the prepared coatings are amorphous with densities varying in a range 4.04, 4.27 and 4.61 g/cm3 through controlling the processing parameter. Their cross-sectional morphologies show that all the coatings are homogeneous, compact and smooth without features of columnar structure existed in the common PVD coatings. The hardness and cor- rosion resistance of coatings are closely related to their densities. When the coating density is in- creased by 14.11%, the hardness is enhanced by 49.01% for the coatings deposited on silicon slice, and the corrosion current density is decreased to 1/3 of that of the one with density 4.04 g/cm3, for the coatings deposited on NdFeB. Correspondingly, the hardness and plastic index are 30.1 GPa and 0.48 respectively for the coating with density 4.61 g/cm3 on silicon slice. Meanwhile, all the coatings with various densities can provide corrosion protection for NdFeB substrates. With the in- creasing coating density the free corrosion potential shifts to the positive direction and the relevant free corrosion current density decreases gradually for the Ti-B coatings on NbFeB, in the contrast, the bare substrate is just the opposite. The coating with density 4.61 g/cm3 on NdFeB exhibits a free corrosion current density 1.34× 10-6 A/cm2, about 1/8 of that ofNdFeB substrate, and free corro- sion potential -0.689 V, 0.220 V nobler than bare substrate in the 3.5% （mass fraction） NaC1 solu- tion. It follows that the amorphous and hard Ti-B coatings can provide good protectiveness to the NdFeB alloy in environments such as NaC1 solution.

关 键 词：非晶涂层 金属基材 硬度 耐蚀性能 

分 类 号：TG174.444[金属学及工艺—金属表面处理]