悬浮石墨烯薄膜的压力敏感特性建模与仿真分析  

Modeling and Simulation Analysis on Pressure-Sensing Characteristics of Suspended Graphene Membranes

作　　者：代岳[1,2] 刘冠军[1,2] 邱静[1,2] 张勇[1,2] DAI Yue LIU Guanjun QIU Jing ZHANG Yong(College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China Science and Technology on Integrated Logistics Support Laboratory, National University of Defense Technology, Changsha 410073, China)

机构地区：[1]国防科学技术大学机电工程与自动化学院,湖南长沙410073 [2]国防科学技术大学装备综合保障技术重点实验室,湖南长沙410073

出　　处：《测试技术学报》2017年第1期1-7,共7页Journal of Test and Measurement Technology

基　　金：国家自然科学基金资助项目(51675528)

摘　　要：针对悬浮式石墨烯压力传感器设计缺乏定量分析方法的问题,本文采用有限元建模仿真方法,建立了矩形、方形和圆形等3种不同形状悬浮石墨烯薄膜的压力敏感特性模型,仿真得到了其压力-应变关系,然后进行了不同条件及与实测值的对比分析.对比分析结果验证了有限元建模仿真的准确性,表明3种形状薄膜中矩形薄膜的中心形变位移和应变最大,且二者随薄膜尺寸的增大而增大.上述结果为悬浮式石墨烯压力传感器的结构与性能优化设计提供了有效指导.In order to solve the problem of lacking quantitative analysis methods for designing pressure sensors based on suspended graphene,the pressure-sensing characteristic models of suspended graphene membranes in three different shapes：rectangular,square and circular are established,using finite element modeling and simulation.After the simulation,Functions between pressure and strain were obtain.Then they were compare and analyze under different conditions,following by contrast with the measured values in the literature.The results of comparing verify the accuracy of finite element modeling and simulation,which shows that among the three shapes,the central deformation displacement and strain of rectangular membrane are the largest,and the two quantities increase with the increase of membrane size.The results above provide an effective guidance for optimizing the structure and performance design for pressure sensors based on suspended graphene.

关 键 词：石墨烯薄膜 压力传感器 压力敏感特性 应变 有限元建模与仿真 

分 类 号：O411.3[理学—理论物理] TB321[理学—物理]