超精密机床静压气浮导轨表面微结构设计研究  

Design of the Aerostatic Linear Guideway with Micro-structured Surfaces for Ultra Precision Machine Tools

作　　者：李天箭[1] 陈宗镁 丁晓红[1] 程凯[3] 

机构地区：[1]上海理工大学机械工程学院,上海200093 [2]上海航天控制技术研究所,上海201109 [3]哈尔滨工业大学机电学院,哈尔滨150001

出　　处：《机械工程学报》2017年第3期193-200,共8页Journal of Mechanical Engineering

基　　金：国家自然科学基金资助项目(51405300)

摘　　要：以减少超精密机床气浮导轨高速运动时气体阻力为设计目标,应用雷诺平均方程(Reynolds-averaged Navier–Stokes equations,RANS)和带旋流修正的k-ε湍流模型,建立导轨微结构功能表面流体动力学减阻分析模型。采用减阻机理分析与仿真方法对比分析矩形沟槽、V形沟槽、U形沟槽、Space-V沟槽等四种微结构表面构型,确定最适合超精密机床气浮导轨表面减阻需求的构型是V形沟槽结构表面。继而对V形沟槽表面几何参数进行优化设计,获得优化的沟槽角度、宽度、间距设计参数,确定最优超精密机床静压气浮导轨微结构功能表面。该设计研究可用于进一步保障超精密机床设计精度和运动精度。Micro-structured surfaces for aerostatic linear guideways are designed to reduce the gas resistance in high speed machine tools.Frist,an analysis model of micro-structured for air drag reduction is established based on the Reynolds averaged N-S equations and the Realizable k-ε turbulence model.Furthermore,the influencing of various factors on the micro-structured surfaces is identified through the four types of the micro-structures as case studies,by adopting the methods of drag reducing mechanism and simulation analysis,respectively.The four configurations are rectangular groove,V-shaped groove,U-shaped groove and Space-V groove surfaces.Among them,the most suitable groove surface for the ultra-precision machine tools is V-shaped groove surface.Finally,optimized analysis for the V-shaped groove surfaces is carried out using geometrical parameters including groove angle,width and gap,etc.The design study can be used to further ensure the design precision and movement accuracy for ultra-precision machine tools.

关 键 词：超精密机床 气浮导轨表面 微结构 减阻 V形沟槽 

分 类 号：TH702[机械工程—仪器科学与技术] TH122[机械工程—精密仪器及机械]