Enhanced CMOS image sensor by flexible 3D nanocone anti-reflection film  

作　　者：Li Tian Xiaolei Luo Min Yin Dongdong Li Xinzhong Xue Hui Wang 

机构地区：[1]Shanghai Advanced Research Institute, Chinese Academy of Sciences [2]School of Environmental and Chemical Engineering, Shanghai University

出　　处：《Science Bulletin》2017年第2期130-135,共6页科学通报（英文版）

基　　金：financially supported by the National Natural Science Foundation of China(61474128,21503261,61504155and 61404145);Youth Innovation Fund for Interdisciplinary Research of SARI(Y526453233,141004);Science & Technology Commission of Shanghai Municipality(14JC1492900,14511102302,15DZ1100502);Youth Innovation Promotion Association,CAS(2013302);Development Fund for Information communication and integrated circuit technology public service platform(No.2016-14)supported by Zhangjiang Adminstrative Committee

摘　　要：Complementary metal oxide semiconductor(CMOS) image sensors(CIS) are being widely used in digital video cameras, web cameras, digital single lens reflex camera(DSLR), smart phones and so on, owing to their high level of integration, random accessibility, and low-power operation. It needs to be installed with the cover glass in practical applications to protect the sensor from damage, mechanical issues,and environmental conditions, which, however, limits the accuracy and usability of the sensor due to the reflection in the optical path from air-to-cover glass-to-air. In this work, the flexible 3D nanocone anti-reflection(AR) film with controlled aspect ratio was firstly employed to reduce the light reflection at air/cover glass/air interfaces by directly attaching onto the front and rear sides of the CIS cover glass.As both the front and rear sides of cover glass were coated by the AR film, the output image quality was found to be improved with external quantum efficiency increased by 7%, compared with that without AR film. The mean digital data value, root-mean-square contrast, and dynamic range are increased by45.14%, 38.61% and 57, respectively, for the output image with AR films. These results provide a novel and facile pathway to improve the CIS performance and also could be extended to rational design of other image sensors and optoelectronic devices.Complementary metal oxide semiconductor （CMOS） image sensors （CIS） are being widely used in digital video cameras, web cameras, digital single lens reflex camera （DSLR）, smart phones and so on, owing to their high level of integration, random accessibility, and low-power operation. It needs to be installed with the cover glass in practical applications to protect the sensor from damage, mechanical issues, and environmental conditions, which, however, limits the accuracy and usability of the sensor due to the reflection in the optical path from air-to-cover glass-to-air. In this work, the flexible 3D nanocone anti-reflection （AR） film with controlled aspect ratio was firstly employed to reduce the light reflection at air/cover glass[air interfaces by directly attaching onto the front and rear sides of the CIS cover glass. As both the front and rear sides of cover glass were coated by the AR film, the output image quality was found to be improved with external quantum efficiency increased by 7%, compared with that without AR film. The mean digital data value, root-mean-square contrast, and dynamic range are increased by 45.14%, 38.61% and 57, respectively, for the output image with AR films. These results provide a novel and facile pathway to improve the CIS performance and also could be extended to rational design of other image sensors and optoelectronic devices.

关 键 词：CMOS image sensor Nancone anti-reflection film Quantum efficiency Digital data value Root-mean-square contrast 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN141.305[自动化与计算机技术—控制科学与工程]