Inline真空镀膜线传动密封的微漏分析与对策  

Analyses and solutions on fine leak from feedthrough seal of inline vacuum coating system

作　　者：王琦 

机构地区：[1]深圳市雷莱德科技有限公司,广东深圳518067

出　　处：《真空》2017年第1期60-62,共3页Vacuum

摘　　要：真空设备的漏气是工业化镀膜生产过程和科学实验中最头疼的问题,它对镀膜工艺有着显著的影响,尤其是微漏,在开始时很难检测得到,使得正常生产或做实验样品时做出来的产品的性能参数不稳定、时好时坏,造成工艺人员或实验人员不知从何下手,是设备问题还是工艺问题?模棱两可,设备人员推脱是工艺问题,工艺人员推说是设备问题,检漏又找不到漏点,莫衷一是。出现这样的情况往往都是微漏引起的,并且大多数情况下都是传动密封的微漏引起的。本文将结合自己从事真空镀膜多年的设备改造和生产管理的经验对传动密封和由此产生的微漏系统地做些介绍。A leakage from vacuum equipment is the most annoyed issue in coating production or experiment. It affects coating process significantly. Especially a fine leak may not be detected clearly at the very beginning. This will result in unstable performance or lower yield on producing a sample or product, and also mislead engineers ＇ judgment on the coating process development. This type of fine leak mostly happens at a conveying feedthrough seal. Based on author ＇s many years experience on coating equipment upgrade and production management, conveying feedthrough seal in inline vacuum coating system and its related fine leak are elaborated.

关 键 词：穿透式传动 微漏 密封 

分 类 号：TB743[一般工业技术—材料科学与工程]