利用光栅陷光结构提高红外探测器效率的研究  

Improving Absorption Efficiency of Uncooled Sensor by Grating

作　　者：吴元庆[1] 张金晶[1] 刘春梅[1] 陆晓东[1] 周涛[1] 

机构地区：[1]渤海大学新能源学院,锦州121013

出　　处：《硅酸盐通报》2017年第2期662-667,共6页Bulletin of the Chinese Ceramic Society

基　　金：国家自然科学基金项目(11304020)

摘　　要：红外非制冷热探测器的制备,通常在CMOS读出电路上制作悬空结构来实现。传感器将吸收的热量转化为电信号由检测电路检出,但该结构吸收效率偏低。本研究提出了一种基于光栅陷光结构激发表面等离子体谐振吸收的红外探测器结构。基于电磁场理论分析了结构参数对红外光学吸收的影响,利用数值模拟的方法,研究了金属-介质-金属三明治结构红外探测器的吸收效率,并通过结构参数的优化使吸收结构对特定红外波段的吸收率达到95%以上,在整个波长范围内平均吸收效率达32.6%。Common method of building uncooled infrared sensors is to build cantilevers on CMOS circuit.Detectors changed temperature into voltage change or current signal and detected,the absorption efficiency of the structure is limited. This paper presents an infrared detector structure based on surface plasmon resonance to improve absorption efficiency. Through electromagnetic simulation of infrared absorption variation with the structure parameters,more than 95% absorption is reached within specified spectral band under optimized condition for this kind of detector. The average absorption efficiency was 32. 6% in whole wavelength range.

关 键 词：非制冷 红外探测器 等离子体谐振 光栅 

分 类 号：TN215[电子电信—物理电子学]