一种新型单片集成光谱传感器的波长定标方法（英文）  

Wavelength calibration of a new monolithically integrated spectral sensor

作　　者：张亚光[1,2] 庄新港 王绪泉 刘俊良[1,3] 方家熊[1,5] 邵秀梅[5] 王丽丽[1,4] 

机构地区：[1]山东大学光学高等研究中心,山东济南250100 [2]山东大学晶体材料国家重点实验室,山东济南250100 [3]山东大学信息科学与工程学院,山东济南250100 [4]中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室,上海200050 [5]中国科学院上海技术物理研究所传感技术联合国家重点实验室,上海200083

出　　处：《红外与毫米波学报》2017年第1期15-19,共5页Journal of Infrared and Millimeter Waves

基　　金：Supported by the National Nature Science Foundation of China(61376052);the Project of State Key Laboratories of Transducer Technology(SKT1507)

摘　　要：新型短波红外单片集成光谱传感器(MCSS)是光谱传感物联网的核心感知部件.提出了一种MCSS的波长定标方法,根据相对光谱响应度和波长分配原则把相邻像素组成一个定标通道.分别采用MCSS和两款商用光谱仪测量标准物质的光谱.实验结果表明,平均定标偏差为1.8 nm,与一款具有相似FWHM和取样间隔的商用光谱仪接近,能够满足实际应用的需要.A new near-infrared monolithically integrated multichannel spectral sensor （MCSS） serves as a key component of Spectral-sensing Internet of Things （SSIOT）. A wavelength calibration method for the MCSS was proposed. The method is based on the relative spectral response and includes specific principles of wavelength allo- cation. Several pixels comprised a channel with the calibrated wavelength. Experimental tests were conducted in the calibrated MCSS and other two commercial spectrometers. The compared spectrum results demonstrated calibration accuracy of 1.8 nm on average, with performance as good as a commercial spectrometer equipped with similar FWHM and sampling intervals, which can meet the application demand.

关 键 词：短波红外 单片集成光谱传感器 波长定标 光谱传感物联网 

分 类 号：TB96[机械工程—光学工程] O433.1[一般工业技术—计量学]