大口径激光传输反射镜低应力夹持工艺设计  

Low-Stress Mounting Configuration Design for Large Aperture Laser Transmission Mirror

作　　者：张政[1] 全旭松 王辉[1] 姚超[1] 融亦鸣[1] 

机构地区：[1]清华大学机械工程系,北京100084 [2]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《光学学报》2017年第1期207-215,共9页Acta Optica Sinica

基　　金：国家自然科学基金(51575310);北京市自然科学基金(3162014)

摘　　要：从惯性约束核聚变(ICF)装置中具有重要作用的大口径激光传输反射镜出发,基于中国神光-Ⅲ主机装置的工程实践,分析了大口径激光传输反射镜夹持工艺的技术现状和难点,建立了大口径反射镜受夹持力变形的通用力学模型,提出了基于挠性零件的全新低应力夹持工艺,并利用有限元仿真和现场实验相结合的方法对挠性零件的力学特性进行了工艺效果验证。基于挠性零件的特点设计了新的全口径反射镜组件,对比研究了新旧工艺下夹持力对面形畸变(波前误差)的影响。最后,结合全新反射镜组件和夹持诱导畸变数值解耦方法构建了更加高效的完整装配工艺流程。该研究对解决大口径光学元件夹持诱导变形这一难题具有重要意义,有望为建设下一代ICF装置提供更加高效、可靠的技术方案。The large aperture laser transmission mirror is a crucial optical unit of the high power solid-state laser in the inertial confinement fusion（ICF）facility.Based on the engineering practice of the SG-Ⅲfacility,the technology status and key problems of the low-stress mounting configuration for the mirror are summarized firstly.Then,a general mechanical model of the deformed mirror is built with the elastic mechanics theory.Furthermore,a brand new low-stress mounting configuration with flexure support is proposed and the mechanical properties of the flexure support are verified with the finite element method and field experiments.The new integrated mirror assembly is designed and the influence of mounting force on surface deformation under the current and the new technologies is studied by comparison.Finally,with combination of the new mounting configuration and the numerical decoupling method of stress-induced deformation,apromising process flow is discussed.The study is of great significance for solving the mounting-induced deformation of the large aperture optical devices,and is expected to provide effective and reliable technical schemes for constructing ICF facility of the next generation.

关 键 词：激光器 低应力夹持 波前误差 高功率固体激光器 大口径反射镜 

分 类 号：TH161[机械工程—机械制造及自动化] TN242[电子电信—物理电子学]