一种适用于原位纳米力学测试的AFM测头  

A New AFM Head Designed for In-situ Nano-Mechanics Measurement

作　　者：李艳宁[1] 曾荟燕[1] 吴森[1] 刘璐[1] 胡晓东[1] 

机构地区：[1]精密测试技术及仪器国家重点实验室(天津大学),天津300072

出　　处：《纳米技术与精密工程》2017年第2期93-99,共7页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金青年基金资助项目(61204117);国家高技术研究发展计划(863计划)资助项目(2012AA041204)

摘　　要：设计并制作了一种适用于原位纳米力学测试的原子力显微镜(AFM)测头.测头由光学检测系统和Z向压电陶瓷微位移机构组成.其中光学检测系统采用光杠杆与显微镜同轴光路检测探针形变,压电位移机构内置电容传感器可实现探针进给量的闭环控制.标定实验表明该测头闭环位移分辨力优于10 nm,在标定范围内具有很好的线性.利用该测头对某型微悬臂梁法向弹性常数进行了测量,测得值与采用具有溯源性的标定方法所得结果一致.A new atomic force microscopy （AFM） head is developed for the in-situ nano-mechanics measurement. The AFM head is composed of an optical detection system and a piezo scanner in Z-axis. The optical detection system consists of a microscope and a coaxial optical lever, which can detect the de- flection of the AFM cantilever probe. The piezo scanner is integrated with a ring-shaped capacitance sen- sor which can realize closed-loop control of the displacement in Z-axis. Calibration indicates that the closed-loop resolution of the Z-scanner is better than 10 nm, and the displacement is with good linearity in the whole range. The AFM head is utilized to measure the normal spring constant of a micro cantile- ver. The measurement result is in agreement with the value obtained by a traceable calibration method.

关 键 词：纳米力学 原子力显微镜 压电扫描器 光杠杆 电容传感器 

分 类 号：TH742[机械工程—光学工程]