大承载气浮回转工作台的调心技术  

Eccentric adjusting technology for large bearing floating rotating worktable

作　　者：高冠 刘恩涛[1] 张恒利[1] 马飞[1] 王允[1] GAO Guan LIU Entao ZHANG Hengli MA Fei WANG Yun(Precision Photoelectric Test Instrument and Technology Key Laboratory of Beijing City, Beijing Institute of Technology, Beijing 100081, China)

机构地区：[1]北京理工大学精密光电测试仪器及技术北京市重点实验室,北京100081

出　　处：《光学技术》2017年第2期144-147,共4页Optical Technique

摘　　要：为了实现大口径光学元件表面轮廓的高精度测量,提出了一种大承载气浮回转工作台的调心技术,并研制了一套具有偏心自动调整功能的测控系统。该系统主要由精密气浮回转轴、台达PLC、数显千分表和轮廓仪工作台组成。利用VC++的PLC串口通讯和偏心调整软件的控制,实现了轮廓仪的自动调心功能。In order to realize the high precision measurement of the surface profile of the large aspherical mirror, a set of measurement and control system with automatic adjustment function is developed, which is based on the automatic ad- justment of the working platform. The system mainly includes precision air back shaft, Delta PLC, digital micrometer and profile meter, which uses PLC serial communication, eccentric adjustment software control. These software are based on VC＋＋. It can realize the profile meter automatic aligning function.

关 键 词：应用光学 大口径光学元件 大承载 气浮 偏心调整 

分 类 号：TH741[机械工程—光学工程]